X-ray photoelectron spectroscopy study of Pt-oxide thin films deposited by reactive sputtering using O₂/Ar gas mixtures

Engineering & Materials Science

• Reactive sputtering 100%
• Oxide films 78%
• X ray photoelectron spectroscopy 77%
• Gas mixtures 71%
• Thin films 59%
• Oxygen 51%
• X ray diffraction 41%
• Oxides 36%
• Chemical shift 35%
• Scanning electron microscopy 33%
• Magnetron sputtering 28%
• Crystalline materials 22%
• Oxidation 18%

Physics & Astronomy

• gas mixtures 59%
• photoelectron spectroscopy 52%
• sputtering 49%
• oxides 39%
• mixing ratios 38%
• thin films 32%
• oxygen 28%
• x rays 28%
• scanning electron microscopy 20%
• diffraction 16%
• chemical equilibrium 16%
• magnetron sputtering 13%
• oxidation 11%
• shift 9%
• energy 4%