Vertical channel double split-gate (VCDSG) flash memory

Jang Gn Yun, Il Han Park, Jung Hoon Lee, Se Hwan Park, Yoon Kim, Dong Hua Lee, Seongjae Cho, Doo Hyun Kim, Gil Sung Lee, Won Bo Sim, Jong Duk Lee, Byung Gook Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A novel vertical channel double split-gate (VCDSG) flash memory is investigated. As well as the single-level operation, this device is especially useful for the multi-level cell (MLC) to operate as a 4-bit/cell. Operation and fabrication issues related with the 3-dimensional cell structure are addressed. For high density integration, simple contact array scheme is proposed.

Original languageEnglish
Title of host publicationIEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008
DOIs
StatePublished - 2008
EventIEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008 - Honolulu, HI, United States
Duration: 15 Jun 200816 Jun 2008

Publication series

NameIEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008

Conference

ConferenceIEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008
Country/TerritoryUnited States
CityHonolulu, HI
Period15/06/0816/06/08

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