Thermodynamic stability and kinetics of Y-Ba-Cu-O film growth at high rates in atomic and molecular oxygen

W. Jo; L. S.J. Peng; W. Wang; T. Ohnishi; A. F. Marshall; R. H. Hammond; M. R. Beasley; E. J. Peterson

doi:10.1016/S0022-0248(01)00872-7

Thermodynamic stability and kinetics of Y-Ba-Cu-O film growth at high rates in atomic and molecular oxygen

W. Jo
, L. S.J. Peng
, W. Wang
, T. Ohnishi
, A. F. Marshall
, R. H. Hammond
, M. R. Beasley
, E. J. Peterson

Department of Physics

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

High temperature superconductor YBa₂Cu₃O_7-x thin films have been grown using in situ electron beam evaporation at deposition rates over 1-10 nm/s. The higher activity of atomic oxygen is being explored along with molecular oxygen at reduced pressure (5 × 10^-5 Torr). Preliminary observations indicate that YBa₂Cu₃O_7-x is stable within a band of atomic oxygen flux and temperature, similar to that published for YBa₂Cu₃O_7-x in molecular oxygen but many orders of magnitude lower in flux. The phase equilibrium appears to be different from that found for molecular oxygen at low rates.

Original language	English
Pages (from-to)	183-189
Number of pages	7
Journal	Journal of Crystal Growth
Volume	225
Issue number	2-4
DOIs	https://doi.org/10.1016/S0022-0248(01)00872-7
State	Published - May 2001

Bibliographical note

Funding Information:
This project is supported by DOE in the Superconductivity Program for Electric Systems, and with help from 3 M in terms of loans of equipment and characterization such as ICP, SIMS, AES, and XRD. Special thanks to R.E. Ericson, C.V. Hamilton, and J.G. Storer of 3 M.

Keywords

A3. Vapor phase epitaxy
B1. Cuprates
B2. Superconducting materials

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10.1016/S0022-0248(01)00872-7

Cite this

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title = "Thermodynamic stability and kinetics of Y-Ba-Cu-O film growth at high rates in atomic and molecular oxygen",

abstract = "High temperature superconductor YBa2Cu3O7-x thin films have been grown using in situ electron beam evaporation at deposition rates over 1-10 nm/s. The higher activity of atomic oxygen is being explored along with molecular oxygen at reduced pressure (5 × 10-5 Torr). Preliminary observations indicate that YBa2Cu3O7-x is stable within a band of atomic oxygen flux and temperature, similar to that published for YBa2Cu3O7-x in molecular oxygen but many orders of magnitude lower in flux. The phase equilibrium appears to be different from that found for molecular oxygen at low rates.",

keywords = "A3. Vapor phase epitaxy, B1. Cuprates, B2. Superconducting materials",

author = "W. Jo and Peng, \{L. S.J.\} and W. Wang and T. Ohnishi and Marshall, \{A. F.\} and Hammond, \{R. H.\} and Beasley, \{M. R.\} and Peterson, \{E. J.\}",

note = "Funding Information: This project is supported by DOE in the Superconductivity Program for Electric Systems, and with help from 3 M in terms of loans of equipment and characterization such as ICP, SIMS, AES, and XRD. Special thanks to R.E. Ericson, C.V. Hamilton, and J.G. Storer of 3 M. ",

year = "2001",

month = may,

doi = "10.1016/S0022-0248(01)00872-7",

language = "English",

volume = "225",

pages = "183--189",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier B.V.",

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T1 - Thermodynamic stability and kinetics of Y-Ba-Cu-O film growth at high rates in atomic and molecular oxygen

AU - Jo, W.

AU - Peng, L. S.J.

AU - Wang, W.

AU - Ohnishi, T.

AU - Marshall, A. F.

AU - Hammond, R. H.

AU - Beasley, M. R.

AU - Peterson, E. J.

N1 - Funding Information: This project is supported by DOE in the Superconductivity Program for Electric Systems, and with help from 3 M in terms of loans of equipment and characterization such as ICP, SIMS, AES, and XRD. Special thanks to R.E. Ericson, C.V. Hamilton, and J.G. Storer of 3 M.

PY - 2001/5

Y1 - 2001/5

N2 - High temperature superconductor YBa2Cu3O7-x thin films have been grown using in situ electron beam evaporation at deposition rates over 1-10 nm/s. The higher activity of atomic oxygen is being explored along with molecular oxygen at reduced pressure (5 × 10-5 Torr). Preliminary observations indicate that YBa2Cu3O7-x is stable within a band of atomic oxygen flux and temperature, similar to that published for YBa2Cu3O7-x in molecular oxygen but many orders of magnitude lower in flux. The phase equilibrium appears to be different from that found for molecular oxygen at low rates.

AB - High temperature superconductor YBa2Cu3O7-x thin films have been grown using in situ electron beam evaporation at deposition rates over 1-10 nm/s. The higher activity of atomic oxygen is being explored along with molecular oxygen at reduced pressure (5 × 10-5 Torr). Preliminary observations indicate that YBa2Cu3O7-x is stable within a band of atomic oxygen flux and temperature, similar to that published for YBa2Cu3O7-x in molecular oxygen but many orders of magnitude lower in flux. The phase equilibrium appears to be different from that found for molecular oxygen at low rates.

KW - A3. Vapor phase epitaxy

KW - B1. Cuprates

KW - B2. Superconducting materials

UR - https://www.scopus.com/pages/publications/0035335038

U2 - 10.1016/S0022-0248(01)00872-7

DO - 10.1016/S0022-0248(01)00872-7

M3 - Article

AN - SCOPUS:0035335038

SN - 0022-0248

VL - 225

SP - 183

EP - 189

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 2-4

ER -

Thermodynamic stability and kinetics of Y-Ba-Cu-O film growth at high rates in atomic and molecular oxygen

Abstract

Bibliographical note

Keywords

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Cite this