Abstract
High temperature superconductor YBa2Cu3O7-x thin films have been grown using in situ electron beam evaporation at deposition rates over 1-10 nm/s. The higher activity of atomic oxygen is being explored along with molecular oxygen at reduced pressure (5 × 10-5 Torr). Preliminary observations indicate that YBa2Cu3O7-x is stable within a band of atomic oxygen flux and temperature, similar to that published for YBa2Cu3O7-x in molecular oxygen but many orders of magnitude lower in flux. The phase equilibrium appears to be different from that found for molecular oxygen at low rates.
Original language | English |
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Pages (from-to) | 183-189 |
Number of pages | 7 |
Journal | Journal of Crystal Growth |
Volume | 225 |
Issue number | 2-4 |
DOIs | |
State | Published - May 2001 |
Bibliographical note
Funding Information:This project is supported by DOE in the Superconductivity Program for Electric Systems, and with help from 3 M in terms of loans of equipment and characterization such as ICP, SIMS, AES, and XRD. Special thanks to R.E. Ericson, C.V. Hamilton, and J.G. Storer of 3 M.
Keywords
- A3. Vapor phase epitaxy
- B1. Cuprates
- B2. Superconducting materials