Thermal stability simulation of MEMS micro scanner multi-physics simulations coupled with experimental verifications

Seungoh Han; Chang Hyeon Ji; Jae Hyoung Park; Jong Uk Bu

doi:10.5220/0005962700840088

Thermal stability simulation of MEMS micro scanner multi-physics simulations coupled with experimental verifications

Seungoh Han, Chang Hyeon Ji, Jae Hyoung Park, Jong Uk Bu

Electronic and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A practical application of multi-physics simulations was presented. In order to analyse thermal stability of MEMS micro scanner, multi-physics simulation procedure was proposed and then verified by comparing the simulated results to the measured data. The proposed procedure started from defining simulation parameters and was verified stepwise by comparing the interim results with the related experimental data, which has increased the accuracy of the proposed, multi-physics simulation procedure. Based on those results, we could got more insight into the thermal stability issue and the allowable bias limit could be determined, which does not deteriorate the device performance significantly. The proposed simulation procedure is expected to contribute for successful commercialization of MEMS micro scanner by increasing its thermal stability.

Original language	English
Title of host publication	SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications
Editors	Yuri Merkuryev, Tuncer Oren, Mohammad S. Obaidat
Publisher	SciTePress
Pages	84-88
Number of pages	5
ISBN (Electronic)	9789897581991
DOIs	https://doi.org/10.5220/0005962700840088
State	Published - 2016
Event	6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications, SIMULTECH 2016 - Lisbon, Portugal Duration: 29 Jul 2016 → 31 Jul 2016

Publication series

Name	SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications

Conference

Conference	6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications, SIMULTECH 2016
Country/Territory	Portugal
City	Lisbon
Period	29/07/16 → 31/07/16

Bibliographical note

Publisher Copyright:
© Copyright 2016 by SCITEPRESS - Science and Technology Publications, Lda. All rights reserved.

Keywords

MEMS
Micro Scanner
Multi-physics
Pico Projector
Thermal Stability

Access to Document

10.5220/0005962700840088

Cite this

Han, S., Ji, C. H., Park, J. H., & Bu, J. U. (2016). Thermal stability simulation of MEMS micro scanner multi-physics simulations coupled with experimental verifications. In Y. Merkuryev, T. Oren, & M. S. Obaidat (Eds.), SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications (pp. 84-88). (SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications). SciTePress. https://doi.org/10.5220/0005962700840088

Han, Seungoh ; Ji, Chang Hyeon ; Park, Jae Hyoung et al. / Thermal stability simulation of MEMS micro scanner multi-physics simulations coupled with experimental verifications. SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications. editor / Yuri Merkuryev ; Tuncer Oren ; Mohammad S. Obaidat. SciTePress, 2016. pp. 84-88 (SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications).

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title = "Thermal stability simulation of MEMS micro scanner multi-physics simulations coupled with experimental verifications",

abstract = "A practical application of multi-physics simulations was presented. In order to analyse thermal stability of MEMS micro scanner, multi-physics simulation procedure was proposed and then verified by comparing the simulated results to the measured data. The proposed procedure started from defining simulation parameters and was verified stepwise by comparing the interim results with the related experimental data, which has increased the accuracy of the proposed, multi-physics simulation procedure. Based on those results, we could got more insight into the thermal stability issue and the allowable bias limit could be determined, which does not deteriorate the device performance significantly. The proposed simulation procedure is expected to contribute for successful commercialization of MEMS micro scanner by increasing its thermal stability.",

keywords = "MEMS, Micro Scanner, Multi-physics, Pico Projector, Thermal Stability",

author = "Seungoh Han and Ji, {Chang Hyeon} and Park, {Jae Hyoung} and Bu, {Jong Uk}",

note = "Publisher Copyright: {\textcopyright} Copyright 2016 by SCITEPRESS - Science and Technology Publications, Lda. All rights reserved.; 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications, SIMULTECH 2016 ; Conference date: 29-07-2016 Through 31-07-2016",

year = "2016",

doi = "10.5220/0005962700840088",

language = "English",

series = "SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications",

publisher = "SciTePress",

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Han, S, Ji, CH, Park, JH & Bu, JU 2016, Thermal stability simulation of MEMS micro scanner multi-physics simulations coupled with experimental verifications. in Y Merkuryev, T Oren & MS Obaidat (eds), SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications. SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications, SciTePress, pp. 84-88, 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications, SIMULTECH 2016, Lisbon, Portugal, 29/07/16. https://doi.org/10.5220/0005962700840088

Thermal stability simulation of MEMS micro scanner multi-physics simulations coupled with experimental verifications. / Han, Seungoh; Ji, Chang Hyeon; Park, Jae Hyoung et al.
SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications. ed. / Yuri Merkuryev; Tuncer Oren; Mohammad S. Obaidat. SciTePress, 2016. p. 84-88 (SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - A practical application of multi-physics simulations was presented. In order to analyse thermal stability of MEMS micro scanner, multi-physics simulation procedure was proposed and then verified by comparing the simulated results to the measured data. The proposed procedure started from defining simulation parameters and was verified stepwise by comparing the interim results with the related experimental data, which has increased the accuracy of the proposed, multi-physics simulation procedure. Based on those results, we could got more insight into the thermal stability issue and the allowable bias limit could be determined, which does not deteriorate the device performance significantly. The proposed simulation procedure is expected to contribute for successful commercialization of MEMS micro scanner by increasing its thermal stability.

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Han S, Ji CH, Park JH, Bu JU. Thermal stability simulation of MEMS micro scanner multi-physics simulations coupled with experimental verifications. In Merkuryev Y, Oren T, Obaidat MS, editors, SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications. SciTePress. 2016. p. 84-88. (SIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications). doi: 10.5220/0005962700840088

Thermal stability simulation of MEMS micro scanner multi-physics simulations coupled with experimental verifications

Abstract

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Bibliographical note

Keywords

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