Thermal stability simulation of MEMS micro scanner multi-physics simulations coupled with experimental verifications

Seungoh Han, Chang Hyeon Ji, Jae Hyoung Park, Jong Uk Bu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A practical application of multi-physics simulations was presented. In order to analyse thermal stability of MEMS micro scanner, multi-physics simulation procedure was proposed and then verified by comparing the simulated results to the measured data. The proposed procedure started from defining simulation parameters and was verified stepwise by comparing the interim results with the related experimental data, which has increased the accuracy of the proposed, multi-physics simulation procedure. Based on those results, we could got more insight into the thermal stability issue and the allowable bias limit could be determined, which does not deteriorate the device performance significantly. The proposed simulation procedure is expected to contribute for successful commercialization of MEMS micro scanner by increasing its thermal stability.

Original languageEnglish
Title of host publicationSIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications
EditorsYuri Merkuryev, Tuncer Oren, Mohammad S. Obaidat
PublisherSciTePress
Pages84-88
Number of pages5
ISBN (Electronic)9789897581991
DOIs
StatePublished - 2016
Event6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications, SIMULTECH 2016 - Lisbon, Portugal
Duration: 29 Jul 201631 Jul 2016

Publication series

NameSIMULTECH 2016 - Proceedings of the 6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications

Conference

Conference6th International Conference on Simulation and Modeling Methodologies, Technologies and Applications, SIMULTECH 2016
Country/TerritoryPortugal
CityLisbon
Period29/07/1631/07/16

Keywords

  • MEMS
  • Micro Scanner
  • Multi-physics
  • Pico Projector
  • Thermal Stability

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