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Thermal atomic layer etching of cobalt using plasma chlorination and chelation with hexafluoroacetylacetone

  • Yongjae Kim
  • , Somin Chae
  • , Heeju Ha
  • , Hyeongwu Lee
  • , Sangheon Lee
  • , Heeyeop Chae

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

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