Theoretical study of B diffusion with charged defects in strained Si

L. Lin, T. Kirichenko, B. R. Sahu, G. S. Hwang, S. K. Banerjee

Research output: Contribution to journalArticlepeer-review

33 Scopus citations

Fingerprint

Dive into the research topics of 'Theoretical study of B diffusion with charged defects in strained Si'. Together they form a unique fingerprint.

Engineering

Material Science

Chemistry