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The control of oscillation mode in silicon microbeams using silicon nitride anchor
In Bok Baek, Bong Kuk Lee, Yarkyeon Kim, Chang Geun Ahn, Young Jun Kim, Yong Sun Yoon, Won Ik Jang, Hakseong Kim, Sang Wook Lee, Seongjae Lee, Han Young Yu
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations