The control of oscillation mode in silicon microbeams using silicon nitride anchor

In Bok Baek, Bong Kuk Lee, Yarkyeon Kim, Chang Geun Ahn, Young Jun Kim, Yong Sun Yoon, Won Ik Jang, Hakseong Kim, Sang Wook Lee, Seongjae Lee, Han Young Yu

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2 Scopus citations


We designed and fabricated gravimetric sensors composed of silicon (Si) microbeams surrounded by silicon nitride (SiN) anchors. The oscillation properties of the fabricated devices show that a single oscillation mode originating from quasi-one-dimensional microbeams appears at an applied alternating electric field, which motion is well matched to the theoretical predictions and is much different from the dimensionally mixed oscillation modes in normal non-anchored devices. In addition, in order to elucidate the possibilities of the devices for mass sensing applications, we measured the frequency shift as a function of mass loading in a self-assembled monolayer of 3-aminopropyltrimethoxysilane and Au nanoparticles. The resulting limit of detection was 1.05×10-18g/Hz, which is an extremely high value for micro electromechanical system gravimetric sensors relative to the normal ones.

Original languageEnglish
Article number103101
JournalApplied Physics Letters
Issue number10
StatePublished - 8 Sep 2014

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