The control of oscillation mode in silicon microbeams using silicon nitride anchor

In Bok Baek; Bong Kuk Lee; Yarkyeon Kim; Chang Geun Ahn; Young Jun Kim; Yong Sun Yoon; Won Ik Jang; Hakseong Kim; Sang Wook Lee; Seongjae Lee; Han Young Yu

doi:10.1063/1.4895119

The control of oscillation mode in silicon microbeams using silicon nitride anchor

In Bok Baek, Bong Kuk Lee, Yarkyeon Kim, Chang Geun Ahn, Young Jun Kim, Yong Sun Yoon, Won Ik Jang, Hakseong Kim, Sang Wook Lee, Seongjae Lee, Han Young Yu

Department of Physics

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

We designed and fabricated gravimetric sensors composed of silicon (Si) microbeams surrounded by silicon nitride (SiN) anchors. The oscillation properties of the fabricated devices show that a single oscillation mode originating from quasi-one-dimensional microbeams appears at an applied alternating electric field, which motion is well matched to the theoretical predictions and is much different from the dimensionally mixed oscillation modes in normal non-anchored devices. In addition, in order to elucidate the possibilities of the devices for mass sensing applications, we measured the frequency shift as a function of mass loading in a self-assembled monolayer of 3-aminopropyltrimethoxysilane and Au nanoparticles. The resulting limit of detection was 1.05×10^-18g/Hz, which is an extremely high value for micro electromechanical system gravimetric sensors relative to the normal ones.

Original language	English
Article number	103101
Journal	Applied Physics Letters
Volume	105
Issue number	10
DOIs	https://doi.org/10.1063/1.4895119
State	Published - 8 Sep 2014

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title = "The control of oscillation mode in silicon microbeams using silicon nitride anchor",

abstract = "We designed and fabricated gravimetric sensors composed of silicon (Si) microbeams surrounded by silicon nitride (SiN) anchors. The oscillation properties of the fabricated devices show that a single oscillation mode originating from quasi-one-dimensional microbeams appears at an applied alternating electric field, which motion is well matched to the theoretical predictions and is much different from the dimensionally mixed oscillation modes in normal non-anchored devices. In addition, in order to elucidate the possibilities of the devices for mass sensing applications, we measured the frequency shift as a function of mass loading in a self-assembled monolayer of 3-aminopropyltrimethoxysilane and Au nanoparticles. The resulting limit of detection was 1.05×10-18g/Hz, which is an extremely high value for micro electromechanical system gravimetric sensors relative to the normal ones.",

author = "Baek, {In Bok} and Lee, {Bong Kuk} and Yarkyeon Kim and Ahn, {Chang Geun} and Kim, {Young Jun} and Yoon, {Yong Sun} and Jang, {Won Ik} and Hakseong Kim and Lee, {Sang Wook} and Seongjae Lee and Yu, {Han Young}",

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T1 - The control of oscillation mode in silicon microbeams using silicon nitride anchor

AU - Baek, In Bok

AU - Lee, Bong Kuk

AU - Kim, Yarkyeon

AU - Ahn, Chang Geun

AU - Kim, Young Jun

AU - Yoon, Yong Sun

AU - Jang, Won Ik

AU - Kim, Hakseong

AU - Lee, Sang Wook

AU - Lee, Seongjae

AU - Yu, Han Young

PY - 2014/9/8

Y1 - 2014/9/8

N2 - We designed and fabricated gravimetric sensors composed of silicon (Si) microbeams surrounded by silicon nitride (SiN) anchors. The oscillation properties of the fabricated devices show that a single oscillation mode originating from quasi-one-dimensional microbeams appears at an applied alternating electric field, which motion is well matched to the theoretical predictions and is much different from the dimensionally mixed oscillation modes in normal non-anchored devices. In addition, in order to elucidate the possibilities of the devices for mass sensing applications, we measured the frequency shift as a function of mass loading in a self-assembled monolayer of 3-aminopropyltrimethoxysilane and Au nanoparticles. The resulting limit of detection was 1.05×10-18g/Hz, which is an extremely high value for micro electromechanical system gravimetric sensors relative to the normal ones.

AB - We designed and fabricated gravimetric sensors composed of silicon (Si) microbeams surrounded by silicon nitride (SiN) anchors. The oscillation properties of the fabricated devices show that a single oscillation mode originating from quasi-one-dimensional microbeams appears at an applied alternating electric field, which motion is well matched to the theoretical predictions and is much different from the dimensionally mixed oscillation modes in normal non-anchored devices. In addition, in order to elucidate the possibilities of the devices for mass sensing applications, we measured the frequency shift as a function of mass loading in a self-assembled monolayer of 3-aminopropyltrimethoxysilane and Au nanoparticles. The resulting limit of detection was 1.05×10-18g/Hz, which is an extremely high value for micro electromechanical system gravimetric sensors relative to the normal ones.

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The control of oscillation mode in silicon microbeams using silicon nitride anchor

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