Surface roughness instabilities in low-angle ion milling

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2 Scopus citations

Original language	English
Pages (from-to)	1318-1319
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	12
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S1431927606067201
State	Published - Aug 2006

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@article{b8ca22ffeeb94902a8e71d5c4d125bca,

title = "Surface roughness instabilities in low-angle ion milling",

author = "Barnard, \{A. W.\} and Hyun, \{J. K.\} and Grazul, \{J. L.\} and Muller, \{D. A.\}",

year = "2006",

month = aug,

doi = "10.1017/S1431927606067201",

language = "English",

volume = "12",

pages = "1318--1319",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

number = "SUPPL. 2",

}

TY - JOUR

T1 - Surface roughness instabilities in low-angle ion milling

AU - Barnard, A. W.

AU - Hyun, J. K.

AU - Grazul, J. L.

AU - Muller, D. A.

PY - 2006/8

Y1 - 2006/8

UR - https://www.scopus.com/pages/publications/33750868746

U2 - 10.1017/S1431927606067201

DO - 10.1017/S1431927606067201

M3 - Article

AN - SCOPUS:33750868746

SN - 1431-9276

VL - 12

SP - 1318

EP - 1319

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - SUPPL. 2

ER -