Surface nanostructuring by implantation of cluster ions

V. N. Popok; S. V. Prasalovich; E. E.B. Campbell

doi:10.1016/j.vacuum.2004.07.029

Surface nanostructuring by implantation of cluster ions

V. N. Popok, S. V. Prasalovich, E. E.B. Campbell

Department of Physics

Research output: Contribution to journal › Conference article › peer-review

21 Scopus citations

Abstract

A brief state-of-the-art review in the field of cluster ion implantation is presented. Ionised cluster beams are considered as a controllable and versatile tool for modification and processing of surfaces and near-surface layers on an atomistic scale as an alternative to ion implantation and ion-assisted deposition. The main effects occurring under cluster-surface collisions as well as advantages in the application of cluster ion beams are reviewed. The problem of surface erosion under impact of energetic cluster ions is emphasised in the paper. A model explaining crater and hillock formation on target surfaces with relation to the thermal-transfer effect and local target melting at the collision spot is discussed.

Original language	English
Pages (from-to)	265-272
Number of pages	8
Journal	Vacuum
Volume	76
Issue number	2-3
DOIs	https://doi.org/10.1016/j.vacuum.2004.07.029
State	Published - 5 Nov 2004
Event	13th International School on Vacuum, Electron and Ion Technology - Varna, Bulgaria Duration: 15 Sep 2003 → 19 Sep 2003

Bibliographical note

Funding Information:
The authors acknowledge financial support from The Swedish Research Council under contracts Nos. 621-2002-5387, 629-2002-7526 and from the Göran Gustafsson Foundation for Research in Natural Science and Medicine.

Keywords

Cluster ion implantation
Cluster-surface collision
Crater
Hillock

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10.1016/j.vacuum.2004.07.029

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title = "Surface nanostructuring by implantation of cluster ions",

abstract = "A brief state-of-the-art review in the field of cluster ion implantation is presented. Ionised cluster beams are considered as a controllable and versatile tool for modification and processing of surfaces and near-surface layers on an atomistic scale as an alternative to ion implantation and ion-assisted deposition. The main effects occurring under cluster-surface collisions as well as advantages in the application of cluster ion beams are reviewed. The problem of surface erosion under impact of energetic cluster ions is emphasised in the paper. A model explaining crater and hillock formation on target surfaces with relation to the thermal-transfer effect and local target melting at the collision spot is discussed.",

keywords = "Cluster ion implantation, Cluster-surface collision, Crater, Hillock",

author = "Popok, {V. N.} and Prasalovich, {S. V.} and Campbell, {E. E.B.}",

note = "Funding Information: The authors acknowledge financial support from The Swedish Research Council under contracts Nos. 621-2002-5387, 629-2002-7526 and from the G{\"o}ran Gustafsson Foundation for Research in Natural Science and Medicine.; 13th International School on Vacuum, Electron and Ion Technology ; Conference date: 15-09-2003 Through 19-09-2003",

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doi = "10.1016/j.vacuum.2004.07.029",

language = "English",

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TY - JOUR

T1 - Surface nanostructuring by implantation of cluster ions

AU - Popok, V. N.

AU - Prasalovich, S. V.

AU - Campbell, E. E.B.

N1 - Funding Information: The authors acknowledge financial support from The Swedish Research Council under contracts Nos. 621-2002-5387, 629-2002-7526 and from the Göran Gustafsson Foundation for Research in Natural Science and Medicine.

PY - 2004/11/5

Y1 - 2004/11/5

N2 - A brief state-of-the-art review in the field of cluster ion implantation is presented. Ionised cluster beams are considered as a controllable and versatile tool for modification and processing of surfaces and near-surface layers on an atomistic scale as an alternative to ion implantation and ion-assisted deposition. The main effects occurring under cluster-surface collisions as well as advantages in the application of cluster ion beams are reviewed. The problem of surface erosion under impact of energetic cluster ions is emphasised in the paper. A model explaining crater and hillock formation on target surfaces with relation to the thermal-transfer effect and local target melting at the collision spot is discussed.

AB - A brief state-of-the-art review in the field of cluster ion implantation is presented. Ionised cluster beams are considered as a controllable and versatile tool for modification and processing of surfaces and near-surface layers on an atomistic scale as an alternative to ion implantation and ion-assisted deposition. The main effects occurring under cluster-surface collisions as well as advantages in the application of cluster ion beams are reviewed. The problem of surface erosion under impact of energetic cluster ions is emphasised in the paper. A model explaining crater and hillock formation on target surfaces with relation to the thermal-transfer effect and local target melting at the collision spot is discussed.

KW - Cluster ion implantation

KW - Cluster-surface collision

KW - Crater

KW - Hillock

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U2 - 10.1016/j.vacuum.2004.07.029

DO - 10.1016/j.vacuum.2004.07.029

M3 - Conference article

AN - SCOPUS:7044285977

SN - 0042-207X

VL - 76

SP - 265

EP - 272

JO - Vacuum

JF - Vacuum

IS - 2-3

T2 - 13th International School on Vacuum, Electron and Ion Technology

Y2 - 15 September 2003 through 19 September 2003

ER -

Surface nanostructuring by implantation of cluster ions

Abstract

Bibliographical note

Keywords

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