Sublithographic nanofabrication technology for nanocatalysts and DNA chips

Research output: Contribution to journal › Article › peer-review

70 Scopus citations

Original language	English
Pages (from-to)	2951-2955
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	6
DOIs	https://doi.org/10.1116/1.1627805
State	Published - 2003

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title = "Sublithographic nanofabrication technology for nanocatalysts and DNA chips",

author = "Choi, \{Yang Kyu\} and Lee, \{Joon Sung\} and Ji Zhu and Somorjai, \{Gabor A.\} and Lee, \{Luke P.\} and Jeffrey Bokor",

year = "2003",

doi = "10.1116/1.1627805",

language = "English",

volume = "21",

pages = "2951--2955",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Sublithographic nanofabrication technology for nanocatalysts and DNA chips

AU - Choi, Yang Kyu

AU - Lee, Joon Sung

AU - Zhu, Ji

AU - Somorjai, Gabor A.

AU - Lee, Luke P.

AU - Bokor, Jeffrey

PY - 2003

Y1 - 2003

UR - https://www.scopus.com/pages/publications/0942267534

U2 - 10.1116/1.1627805

DO - 10.1116/1.1627805

M3 - Article

AN - SCOPUS:0942267534

SN - 1071-1023

VL - 21

SP - 2951

EP - 2955

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -