Sublithographic nanofabrication technology for nanocatalysts and DNA chips

Yang Kyu Choi, Joon Sung Lee, Ji Zhu, Gabor A. Somorjai, Luke P. Lee, Jeffrey Bokor

Research output: Contribution to journalArticlepeer-review

64 Scopus citations
Original languageEnglish
Pages (from-to)2951-2955
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number6
StatePublished - 2003

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