Sublithographic nanofabrication technology for nanocatalysts and DNA chips

Yang Kyu Choi, Joon Sung Lee, Ji Zhu, Gabor A. Somorjai, Luke P. Lee, Jeffrey Bokor

Research output: Contribution to journal › Article › peer-review

65 Scopus citations

Original language	English
Pages (from-to)	2951-2955
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	6
DOIs	https://doi.org/10.1116/1.1627805
State	Published - 2003

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title = "Sublithographic nanofabrication technology for nanocatalysts and DNA chips",

author = "Choi, {Yang Kyu} and Lee, {Joon Sung} and Ji Zhu and Somorjai, {Gabor A.} and Lee, {Luke P.} and Jeffrey Bokor",

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AU - Choi, Yang Kyu

AU - Lee, Joon Sung

AU - Zhu, Ji

AU - Somorjai, Gabor A.

AU - Lee, Luke P.

AU - Bokor, Jeffrey

PY - 2003

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SN - 1071-1023

VL - 21

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EP - 2955

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -