Structure and stability of small self-interstitial clusters in Si: Prediction by first principles-based Monte Carlo simulations

Sangheon Lee, Gyeong S. Hwang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present an efficient computational method for determining the ground-state configurations of self-interstitial clusters in Si, based on a combination of continuous random network model, Metropolis Monte Carlo sampling, and Keating-like valence bond model. Using the new approach, we have determined the structure and stability of small interstitial clusters (In, 3 ≤ n ≤ 12). The results are in good agreement with first principles results.

Original languageEnglish
Title of host publicationECS Transactions - International Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS
Subtitle of host publicationNew Materials, Processes and Equipment, 3
PublisherElectrochemical Society Inc.
Pages339-344
Number of pages6
Edition1
ISBN (Electronic)9781566775502
ISBN (Print)9781566775502
DOIs
StatePublished - 2007
EventInternational Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS: New Materials, Processes and Equipment, 3 - 211th ECS Meeting - Chicago, IL, United States
Duration: 6 May 200710 May 2007

Publication series

NameECS Transactions
Number1
Volume6
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Conference

ConferenceInternational Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS: New Materials, Processes and Equipment, 3 - 211th ECS Meeting
Country/TerritoryUnited States
CityChicago, IL
Period6/05/0710/05/07

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