Abstract
Based on gradient corrected periodic density functional theory calculations, we present the formation, structure, and diffusion of SiO pairs in a -SiO2. We find that a SiO pair preferentially undergoes transformation into an O vacancy through a twofold-coordinated Si atom. We determine the pathways for SiO pair→divalent Si→O vacancy transformation and divalent Si diffusion, along with O vacancy diffusion. Based on these results, we also discuss how the presence of SiO pairs can enhance Si self-diffusion in a -SiO2.
| Original language | English |
|---|---|
| Article number | 054906 |
| Journal | Journal of Applied Physics |
| Volume | 104 |
| Issue number | 5 |
| DOIs | |
| State | Published - 2008 |
Bibliographical note
Funding Information:We acknowledge the National Science Foundation (Grant Nos. CAREER-CTS-0449373 and ECS-0304026), the Semiconductor Research Corporation (Grant No. 1413-001), and the Robert A. Welch Foundation (Grant No. F-1535) for their financial support. We would also like to thank the Texas Advanced Computing Center for use of their computing resources.
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