Structural and optical properties of LiNbO3 films grown by pulsed laser deposition with a shadow mask

Dong Wook Kim; Sang Moon Oh; See Hyung Lee; T. W. Noh

doi:10.1143/jjap.37.2016

Structural and optical properties of LiNbO₃ films grown by pulsed laser deposition with a shadow mask

Dong Wook Kim, Sang Moon Oh, See Hyung Lee, T. W. Noh

Department of Physics

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

High-quality LiNbO₃ thin films were grown by pulsed laser deposition (PLD) with a shadow mask. Epitaxial and twin-free films were obtained using a single crystal target without a post-annealing process. The film had a very smooth surface without the particulate problem, which is common in films grown by conventional PLD. The root-mean-square surface roughness was only 3.6 nm, and optical propagation loss was as low as 3 dB/cm.

Original language	English
Pages (from-to)	2016-2020
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	37
Issue number	4 SUPPL. A
DOIs	https://doi.org/10.1143/jjap.37.2016
State	Published - Apr 1998

Keywords

LiNbO film
Optical propagation loss
Particulate problem
Pulsed laser deposition
Shadow mask
Surface roughness

Access to Document

10.1143/jjap.37.2016

Cite this

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title = "Structural and optical properties of LiNbO3 films grown by pulsed laser deposition with a shadow mask",

abstract = "High-quality LiNbO3 thin films were grown by pulsed laser deposition (PLD) with a shadow mask. Epitaxial and twin-free films were obtained using a single crystal target without a post-annealing process. The film had a very smooth surface without the particulate problem, which is common in films grown by conventional PLD. The root-mean-square surface roughness was only 3.6 nm, and optical propagation loss was as low as 3 dB/cm.",

keywords = "LiNbO film, Optical propagation loss, Particulate problem, Pulsed laser deposition, Shadow mask, Surface roughness",

author = "Kim, \{Dong Wook\} and Oh, \{Sang Moon\} and Lee, \{See Hyung\} and Noh, \{T. W.\}",

year = "1998",

month = apr,

doi = "10.1143/jjap.37.2016",

language = "English",

volume = "37",

pages = "2016--2020",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

issn = "0021-4922",

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Structural and optical properties of LiNbO₃ films grown by pulsed laser deposition with a shadow mask. / Kim, Dong Wook; Oh, Sang Moon; Lee, See Hyung et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 37, No. 4 SUPPL. A, 04.1998, p. 2016-2020.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Structural and optical properties of LiNbO3 films grown by pulsed laser deposition with a shadow mask

AU - Kim, Dong Wook

AU - Oh, Sang Moon

AU - Lee, See Hyung

AU - Noh, T. W.

PY - 1998/4

Y1 - 1998/4

N2 - High-quality LiNbO3 thin films were grown by pulsed laser deposition (PLD) with a shadow mask. Epitaxial and twin-free films were obtained using a single crystal target without a post-annealing process. The film had a very smooth surface without the particulate problem, which is common in films grown by conventional PLD. The root-mean-square surface roughness was only 3.6 nm, and optical propagation loss was as low as 3 dB/cm.

AB - High-quality LiNbO3 thin films were grown by pulsed laser deposition (PLD) with a shadow mask. Epitaxial and twin-free films were obtained using a single crystal target without a post-annealing process. The film had a very smooth surface without the particulate problem, which is common in films grown by conventional PLD. The root-mean-square surface roughness was only 3.6 nm, and optical propagation loss was as low as 3 dB/cm.

KW - LiNbO film

KW - Optical propagation loss

KW - Particulate problem

KW - Pulsed laser deposition

KW - Shadow mask

KW - Surface roughness

UR - https://www.scopus.com/pages/publications/0032050594

U2 - 10.1143/jjap.37.2016

DO - 10.1143/jjap.37.2016

M3 - Article

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SN - 0021-4922

VL - 37

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EP - 2020

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 4 SUPPL. A