Structural and electrical properties of (Ba,Sr)TiO3 thin films grown by liquid delivery MOCVD

W. Jo; D. C. Kim; H. M. Lee; K. Y. Kim

Structural and electrical properties of (Ba,Sr)TiO₃ thin films grown by liquid delivery MOCVD

W. Jo
, D. C. Kim
, H. M. Lee
, K. Y. Kim

Department of Physics

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

(Ba,Sr)TiO₃ thin films were grown by liquid-source delivery chemical vapor deposition. The films were grown over a wide range of substrate temperature and their structural and electrical properties were investigated. Atomic ratio of Ba, Sr, and Ti is found to be strongly dependent on the substrate temperature. X-ray diffraction studies show that formation of perovskite phase occurs at the temperatures higher than 550 °C. Dielectric constant and dissipation loss of the films were measured as 200 and 0.01.

Original language	English
Pages (from-to)	S1442-S1444
Journal	Journal of the Korean Physical Society
Volume	32
Issue number	4 SUPPL.
State	Published - 1998

Cite this

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title = "Structural and electrical properties of (Ba,Sr)TiO3 thin films grown by liquid delivery MOCVD",

abstract = "(Ba,Sr)TiO3 thin films were grown by liquid-source delivery chemical vapor deposition. The films were grown over a wide range of substrate temperature and their structural and electrical properties were investigated. Atomic ratio of Ba, Sr, and Ti is found to be strongly dependent on the substrate temperature. X-ray diffraction studies show that formation of perovskite phase occurs at the temperatures higher than 550 °C. Dielectric constant and dissipation loss of the films were measured as 200 and 0.01.",

author = "W. Jo and Kim, \{D. C.\} and Lee, \{H. M.\} and Kim, \{K. Y.\}",

year = "1998",

language = "English",

volume = "32",

pages = "S1442--S1444",

journal = "Journal of the Korean Physical Society",

issn = "0374-4884",

publisher = "Korean Physical Society",

number = "4 SUPPL.",

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TY - JOUR

T1 - Structural and electrical properties of (Ba,Sr)TiO3 thin films grown by liquid delivery MOCVD

AU - Jo, W.

AU - Kim, D. C.

AU - Lee, H. M.

AU - Kim, K. Y.

PY - 1998

Y1 - 1998

N2 - (Ba,Sr)TiO3 thin films were grown by liquid-source delivery chemical vapor deposition. The films were grown over a wide range of substrate temperature and their structural and electrical properties were investigated. Atomic ratio of Ba, Sr, and Ti is found to be strongly dependent on the substrate temperature. X-ray diffraction studies show that formation of perovskite phase occurs at the temperatures higher than 550 °C. Dielectric constant and dissipation loss of the films were measured as 200 and 0.01.

AB - (Ba,Sr)TiO3 thin films were grown by liquid-source delivery chemical vapor deposition. The films were grown over a wide range of substrate temperature and their structural and electrical properties were investigated. Atomic ratio of Ba, Sr, and Ti is found to be strongly dependent on the substrate temperature. X-ray diffraction studies show that formation of perovskite phase occurs at the temperatures higher than 550 °C. Dielectric constant and dissipation loss of the films were measured as 200 and 0.01.

UR - https://www.scopus.com/pages/publications/0032363509

M3 - Article

AN - SCOPUS:0032363509

SN - 0374-4884

VL - 32

SP - S1442-S1444

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

IS - 4 SUPPL.

ER -

Structural and electrical properties of (Ba,Sr)TiO3 thin films grown by liquid delivery MOCVD

Abstract

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Structural and electrical properties of (Ba,Sr)TiO₃ thin films grown by liquid delivery MOCVD