(Ba,Sr)TiO3 thin films were grown by liquid-source delivery chemical vapor deposition. The films were grown over a wide range of substrate temperature and their structural and electrical properties were investigated. Atomic ratio of Ba, Sr, and Ti is found to be strongly dependent on the substrate temperature. X-ray diffraction studies show that formation of perovskite phase occurs at the temperatures higher than 550 °C. Dielectric constant and dissipation loss of the films were measured as 200 and 0.01.
|Journal||Journal of the Korean Physical Society|
|Issue number||4 SUPPL.|
|State||Published - 1998|