Abstract
(Ba,Sr)TiO3 thin films were grown by liquid-source delivery chemical vapor deposition. The films were grown over a wide range of substrate temperature and their structural and electrical properties were investigated. Atomic ratio of Ba, Sr, and Ti is found to be strongly dependent on the substrate temperature. X-ray diffraction studies show that formation of perovskite phase occurs at the temperatures higher than 550 °C. Dielectric constant and dissipation loss of the films were measured as 200 and 0.01.
Original language | English |
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Pages (from-to) | S1442-S1444 |
Journal | Journal of the Korean Physical Society |
Volume | 32 |
Issue number | 4 SUPPL. |
State | Published - 1998 |