Structural and electrical properties of (Ba,Sr)TiO3 thin films grown by liquid delivery MOCVD

W. Jo, D. C. Kim, H. M. Lee, K. Y. Kim

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

(Ba,Sr)TiO3 thin films were grown by liquid-source delivery chemical vapor deposition. The films were grown over a wide range of substrate temperature and their structural and electrical properties were investigated. Atomic ratio of Ba, Sr, and Ti is found to be strongly dependent on the substrate temperature. X-ray diffraction studies show that formation of perovskite phase occurs at the temperatures higher than 550 °C. Dielectric constant and dissipation loss of the films were measured as 200 and 0.01.

Original languageEnglish
Pages (from-to)S1442-S1444
JournalJournal of the Korean Physical Society
Volume32
Issue number4 SUPPL.
StatePublished - 1998

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