Stress management in sub-90-nm transistor architecture
- R. Arghavani
- , Z. Yuan
- , N. Ingle
- , K. B. Jung
- , M. Seamons
- , S. Venkataraman
- , V. Banthia
- , K. Lilja
- , P. Leon
- , G. Karunasiri
- , S. Yoon
- , A. Mascarenhas
Research output: Contribution to journal › Article › peer-review
43
Scopus
citations