Stacked two dimensional micro-lens scanner for micro confocal imaging array

Sunghoon Kwon; Luke P. Lee

Stacked two dimensional micro-lens scanner for micro confocal imaging array

Sunghoon Kwon, Luke P. Lee

Department of Chemistry & Nanoscience

Research output: Contribution to conference › Paper › peer-review

63 Scopus citations

Abstract

The concept of Micro Confocal Imaging array is proposed and a stacked two-dimensional microlens scanner has been developed. The 2D raster scanner consists of two 1D scanners fabricated in silicon on insulator wafers stacked perpendicularly. Each scanner has a biconvex surface tension induced polymer microlens. Line scanning ranging 75μm at 4.5kHz and 2D raster scanning over an area of 40μm × 40μm are demonstrated at the focal point of the lens, which is equivalent to a maximum of 11° beam steering.

Original language	English
Pages	483-486
Number of pages	4
State	Published - 2002
Event	15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States Duration: 20 Jan 2002 → 24 Jan 2002

Conference

Conference	15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
Country/Territory	United States
City	Las Vegas, NV
Period	20/01/02 → 24/01/02

Keywords

Confocal microscope
Lab-on-a-chip
MEMS
Microlens
Resonator
Scanning

Cite this

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title = "Stacked two dimensional micro-lens scanner for micro confocal imaging array",

abstract = "The concept of Micro Confocal Imaging array is proposed and a stacked two-dimensional microlens scanner has been developed. The 2D raster scanner consists of two 1D scanners fabricated in silicon on insulator wafers stacked perpendicularly. Each scanner has a biconvex surface tension induced polymer microlens. Line scanning ranging 75μm at 4.5kHz and 2D raster scanning over an area of 40μm × 40μm are demonstrated at the focal point of the lens, which is equivalent to a maximum of 11° beam steering.",

keywords = "Confocal microscope, Lab-on-a-chip, MEMS, Microlens, Resonator, Scanning",

author = "Sunghoon Kwon and Lee, \{Luke P.\}",

year = "2002",

language = "English",

pages = "483--486",

note = "15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 ; Conference date: 20-01-2002 Through 24-01-2002",

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TY - CONF

T1 - Stacked two dimensional micro-lens scanner for micro confocal imaging array

AU - Kwon, Sunghoon

AU - Lee, Luke P.

PY - 2002

Y1 - 2002

N2 - The concept of Micro Confocal Imaging array is proposed and a stacked two-dimensional microlens scanner has been developed. The 2D raster scanner consists of two 1D scanners fabricated in silicon on insulator wafers stacked perpendicularly. Each scanner has a biconvex surface tension induced polymer microlens. Line scanning ranging 75μm at 4.5kHz and 2D raster scanning over an area of 40μm × 40μm are demonstrated at the focal point of the lens, which is equivalent to a maximum of 11° beam steering.

AB - The concept of Micro Confocal Imaging array is proposed and a stacked two-dimensional microlens scanner has been developed. The 2D raster scanner consists of two 1D scanners fabricated in silicon on insulator wafers stacked perpendicularly. Each scanner has a biconvex surface tension induced polymer microlens. Line scanning ranging 75μm at 4.5kHz and 2D raster scanning over an area of 40μm × 40μm are demonstrated at the focal point of the lens, which is equivalent to a maximum of 11° beam steering.

KW - Confocal microscope

KW - Lab-on-a-chip

KW - MEMS

KW - Microlens

KW - Resonator

KW - Scanning

UR - https://www.scopus.com/pages/publications/0036120450

M3 - Paper

AN - SCOPUS:0036120450

SP - 483

EP - 486

T2 - 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002

Y2 - 20 January 2002 through 24 January 2002

ER -

Stacked two dimensional micro-lens scanner for micro confocal imaging array

Abstract

Conference

Keywords

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Cite this