Metastable evaporation of carbon cluster ions produced from excimer laser ablation of polyimide has been investigated in a reflection time-of-flight (TOF) mass spectrometer. Rate constants for the decay process are extracted from the parent and fragment peak intensities. The rate constants increase with decreasing delay between laser pulse and TOF extraction field for a given laser fluence and decrease with increasing laser fluence for a given delay.
Bibliographical noteFunding Information:
The authors would like to thank Mr. Edgar Kaiser for supplying the TOF simulation program. Financial support by the Bundes Ministerium ftir For-schung und Technologie (BMm) under contract number 13N5628 “Materialbearbeitung mit Exci-merlasem” is gratefully acknowledged.