Single layer 2D optical scanners with integrated polymer microlenses

Jeonggi Seo; Sebaek Oh; L. P. Lee

doi:10.1109/OMEMS.2002.1031487

Single layer 2D optical scanners with integrated polymer microlenses

Jeonggi Seo, Sebaek Oh, L. P. Lee

Department of Chemistry & Nanoscience

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

Optical scanners based on microelectromechanical systems (MEMS) technology have been developed for optical communication, scanning display, laser imaging, or biological/medical applications. Since most of biological and optical applications require the transmission of UV/visible light, the micro-lens of optical microscanners requires a material that transmit UV/visible wavelength. In terms of effective optical MEMS fabrication and integration issues single layer-based 2D microlens scanner is preferable in comparison to multilayered polysilicon process or a stacked two-dimensional microlens scanner. In this paper, the new single layer 2D optical scanners are reported. Two actuators and a microlens are integrated in single plane. Photopatternable SU-8 is applied for the mechanical coupling and the electrical isolation in order to achieve the single layer-based 2D optical scanners.

Original language	English
Title of host publication	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	151-152
Number of pages	2
ISBN (Electronic)	0780375955, 9780780375956
DOIs	https://doi.org/10.1109/OMEMS.2002.1031487
State	Published - 2002
Event	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland Duration: 20 Aug 2002 → 23 Aug 2002

Publication series

Name	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Country/Territory	Switzerland
City	Lugano
Period	20/08/02 → 23/08/02

Bibliographical note

Publisher Copyright:
© 2002 IEEE.

Access to Document

10.1109/OMEMS.2002.1031487

Cite this

Seo, J., Oh, S., & Lee, L. P. (2002). Single layer 2D optical scanners with integrated polymer microlenses. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 151-152). Article 1031487 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2002.1031487

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title = "Single layer 2D optical scanners with integrated polymer microlenses",

abstract = "Optical scanners based on microelectromechanical systems (MEMS) technology have been developed for optical communication, scanning display, laser imaging, or biological/medical applications. Since most of biological and optical applications require the transmission of UV/visible light, the micro-lens of optical microscanners requires a material that transmit UV/visible wavelength. In terms of effective optical MEMS fabrication and integration issues single layer-based 2D microlens scanner is preferable in comparison to multilayered polysilicon process or a stacked two-dimensional microlens scanner. In this paper, the new single layer 2D optical scanners are reported. Two actuators and a microlens are integrated in single plane. Photopatternable SU-8 is applied for the mechanical coupling and the electrical isolation in order to achieve the single layer-based 2D optical scanners.",

author = "Jeonggi Seo and Sebaek Oh and Lee, {L. P.}",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 ; Conference date: 20-08-2002 Through 23-08-2002",

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Seo, J, Oh, S & Lee, LP 2002, Single layer 2D optical scanners with integrated polymer microlenses. in 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest., 1031487, 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest, Institute of Electrical and Electronics Engineers Inc., pp. 151-152, IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002, Lugano, Switzerland, 20/08/02. https://doi.org/10.1109/OMEMS.2002.1031487

Single layer 2D optical scanners with integrated polymer microlenses. / Seo, Jeonggi; Oh, Sebaek; Lee, L. P.
2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. p. 151-152 1031487 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AB - Optical scanners based on microelectromechanical systems (MEMS) technology have been developed for optical communication, scanning display, laser imaging, or biological/medical applications. Since most of biological and optical applications require the transmission of UV/visible light, the micro-lens of optical microscanners requires a material that transmit UV/visible wavelength. In terms of effective optical MEMS fabrication and integration issues single layer-based 2D microlens scanner is preferable in comparison to multilayered polysilicon process or a stacked two-dimensional microlens scanner. In this paper, the new single layer 2D optical scanners are reported. Two actuators and a microlens are integrated in single plane. Photopatternable SU-8 is applied for the mechanical coupling and the electrical isolation in order to achieve the single layer-based 2D optical scanners.

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Seo J, Oh S, Lee LP. Single layer 2D optical scanners with integrated polymer microlenses. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc. 2002. p. 151-152. 1031487. (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). doi: 10.1109/OMEMS.2002.1031487

Single layer 2D optical scanners with integrated polymer microlenses

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