TY - GEN
T1 - Single layer 2D optical scanners with integrated polymer microlenses
AU - Seo, Jeonggi
AU - Oh, Sebaek
AU - Lee, L. P.
N1 - Funding Information:
This research is supported by DARPA BioFLIP program.
Publisher Copyright:
© 2002 IEEE.
PY - 2002
Y1 - 2002
N2 - Optical scanners based on microelectromechanical systems (MEMS) technology have been developed for optical communication, scanning display, laser imaging, or biological/medical applications. Since most of biological and optical applications require the transmission of UV/visible light, the micro-lens of optical microscanners requires a material that transmit UV/visible wavelength. In terms of effective optical MEMS fabrication and integration issues single layer-based 2D microlens scanner is preferable in comparison to multilayered polysilicon process or a stacked two-dimensional microlens scanner. In this paper, the new single layer 2D optical scanners are reported. Two actuators and a microlens are integrated in single plane. Photopatternable SU-8 is applied for the mechanical coupling and the electrical isolation in order to achieve the single layer-based 2D optical scanners.
AB - Optical scanners based on microelectromechanical systems (MEMS) technology have been developed for optical communication, scanning display, laser imaging, or biological/medical applications. Since most of biological and optical applications require the transmission of UV/visible light, the micro-lens of optical microscanners requires a material that transmit UV/visible wavelength. In terms of effective optical MEMS fabrication and integration issues single layer-based 2D microlens scanner is preferable in comparison to multilayered polysilicon process or a stacked two-dimensional microlens scanner. In this paper, the new single layer 2D optical scanners are reported. Two actuators and a microlens are integrated in single plane. Photopatternable SU-8 is applied for the mechanical coupling and the electrical isolation in order to achieve the single layer-based 2D optical scanners.
UR - http://www.scopus.com/inward/record.url?scp=33645067743&partnerID=8YFLogxK
U2 - 10.1109/OMEMS.2002.1031487
DO - 10.1109/OMEMS.2002.1031487
M3 - Conference contribution
AN - SCOPUS:33645067743
T3 - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
SP - 151
EP - 152
BT - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Y2 - 20 August 2002 through 23 August 2002
ER -