Simple fabrication method for atomically-thin crystal devices with polymer passivation

Yong Hyeon Kim, So Young Kim, Youngwook Kim, Jong Mok Ok, Changil Kwon, Sang Wook Lee, Jun Sung Kim

Research output: Contribution to journalArticlepeer-review

Abstract

Among various candidates of atomically thin crystals, many of them are known to be chemically unstable against elevated temperatures or moisture/oxygen in ambient conditions. Using a mechanical transfer method combined with regular electron-beam lithography, we developed a simple procedure for fabricating the electronic devices based on air-sensitive crystals with polymer passivation. As an example, we show that atomically-thin iron-selenide single crystal maintains its superconductivity after device fabrication, which cannot be realized using the conventional lithography process. This demonstrates that our method offers a new opportunity to investigate the unconventional electrical properties of various atomically-thin air-sensitive crystals.

Original languageEnglish
Pages (from-to)98-102
Number of pages5
JournalSynthetic Metals
Volume216
DOIs
StatePublished - 1 Jun 2016

Keywords

  • Atomically-thin crystals
  • Device fabrication
  • Passivation
  • Van dew Waals materials

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