Silicon optrode array with monolithically integrated SU-8 waveguide and single LED light source

Daeho Ryu, Youjin Lee, Yongseung Lee, Yena Lee, Seoyoung Hwang, Yong Kweon Kim, Sang Beom Jun, Hyang Woon Lee, Chang Hyeon Ji

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


Objective. This paper presents a conventional light emitting diode (LED) and polymer waveguide coupled silicon optrode array. Approach. Unique lens design at the waveguide inlet enables a high light coupling efficiency with a single LED light source, and provides small power consumption compatible with a wireless optogenetic neuromodulation system. To increase the light intensity at the waveguide tip, a lensed waveguide is fabricated with epoxy-based photoresist SU-8, which has a plano-convex lens shape at the waveguide inlet to focus the light in the horizontal direction. In addition, a cylindrical lens is assembled in front of the waveguide inlet to focus the source light in the vertical direction. Main results. The glass cylindrical lens and SU-8 plano-convex lens increased the light coupling efficiency by 6.7 dB and 6.6 dB, respectively. The fabricated 1 × 4 array of optrodes is assembled with a single LED with 465 nm wavelength, which produces a light intensity of approximately 2.7 mW mm-2 at the SU-8 waveguide outlet when 50 mA input current is applied to the LED. Each optrode has four recording electrodes at the SU-8 waveguide outlet. The average impedance of the iridium oxide (IrO x ) electroplated recording electrodes is 43.6 kω. Significance. In-vivo experiment at the hippocampus region CA1 and CA2 demonstrated the capability of optical stimulation and neural signal recording through the LED and SU-8 waveguide coupled silicon optrode array.

Original languageEnglish
Article number046013
JournalJournal of Neural Engineering
Issue number4
StatePublished - 1 Aug 2022

Bibliographical note

Funding Information:
This work was supported by Convergent Technology R&D Program for Human Augmentation through the National Research Foundation of Korea (NRF) funded by Ministry of Science and ICT (NRF 2019M3C1B8090803 and NRF 2019M3C1B8090805).

Publisher Copyright:
© 2022 IOP Publishing Ltd.


  • LED
  • MEMS
  • SU-8 waveguide
  • in-vivo
  • optogenetics
  • silicon optrode


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