We investigated the characteristics of electrons emitted from LiNbO 3 single crystals using a current detector and a 1:1 electron projection system. Exposure to a poor vacuum of 10-1 Torr restored the screening charges to the crystal during discharge and enabled reproducible electron emission within 1 min. We fabricated a patterned Si thin-film mask layer on a LiNbO3 crystal. As conducting thin films suppressed the pyroelectric electron emission from LiNbO3, we could transfer the mask pattern of an array of 10-μm dots to an electron-beam resist using the projection system. The electron beam from the crystal was highly self-focused, and the pattern replication needed neither an electric nor a magnetic field.
|Number of pages||4|
|Journal||Journal of Applied Physics|
|State||Published - 1 Dec 2004|