Self-focused electron beams from pyroelectric LiNbO3 crystals and their pattern-replication capability

Dong Wook Kim; C. W. Moon; Soo Hwan Jeong; In K. Yoo

doi:10.1063/1.1809776

Self-focused electron beams from pyroelectric LiNbO₃ crystals and their pattern-replication capability

Dong Wook Kim, C. W. Moon, Soo Hwan Jeong, In K. Yoo

Department of Physics

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

We investigated the characteristics of electrons emitted from LiNbO ₃ single crystals using a current detector and a 1:1 electron projection system. Exposure to a poor vacuum of 10^-1 Torr restored the screening charges to the crystal during discharge and enabled reproducible electron emission within 1 min. We fabricated a patterned Si thin-film mask layer on a LiNbO₃ crystal. As conducting thin films suppressed the pyroelectric electron emission from LiNbO₃, we could transfer the mask pattern of an array of 10-μm dots to an electron-beam resist using the projection system. The electron beam from the crystal was highly self-focused, and the pattern replication needed neither an electric nor a magnetic field.

Original language	English
Pages (from-to)	6884-6887
Number of pages	4
Journal	Journal of Applied Physics
Volume	96
Issue number	11
DOIs	https://doi.org/10.1063/1.1809776
State	Published - 1 Dec 2004

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abstract = "We investigated the characteristics of electrons emitted from LiNbO 3 single crystals using a current detector and a 1:1 electron projection system. Exposure to a poor vacuum of 10-1 Torr restored the screening charges to the crystal during discharge and enabled reproducible electron emission within 1 min. We fabricated a patterned Si thin-film mask layer on a LiNbO3 crystal. As conducting thin films suppressed the pyroelectric electron emission from LiNbO3, we could transfer the mask pattern of an array of 10-μm dots to an electron-beam resist using the projection system. The electron beam from the crystal was highly self-focused, and the pattern replication needed neither an electric nor a magnetic field.",

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AU - Kim, Dong Wook

AU - Moon, C. W.

AU - Jeong, Soo Hwan

AU - Yoo, In K.

PY - 2004/12/1

Y1 - 2004/12/1

N2 - We investigated the characteristics of electrons emitted from LiNbO 3 single crystals using a current detector and a 1:1 electron projection system. Exposure to a poor vacuum of 10-1 Torr restored the screening charges to the crystal during discharge and enabled reproducible electron emission within 1 min. We fabricated a patterned Si thin-film mask layer on a LiNbO3 crystal. As conducting thin films suppressed the pyroelectric electron emission from LiNbO3, we could transfer the mask pattern of an array of 10-μm dots to an electron-beam resist using the projection system. The electron beam from the crystal was highly self-focused, and the pattern replication needed neither an electric nor a magnetic field.

AB - We investigated the characteristics of electrons emitted from LiNbO 3 single crystals using a current detector and a 1:1 electron projection system. Exposure to a poor vacuum of 10-1 Torr restored the screening charges to the crystal during discharge and enabled reproducible electron emission within 1 min. We fabricated a patterned Si thin-film mask layer on a LiNbO3 crystal. As conducting thin films suppressed the pyroelectric electron emission from LiNbO3, we could transfer the mask pattern of an array of 10-μm dots to an electron-beam resist using the projection system. The electron beam from the crystal was highly self-focused, and the pattern replication needed neither an electric nor a magnetic field.

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JF - Journal of Applied Physics

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Self-focused electron beams from pyroelectric LiNbO3 crystals and their pattern-replication capability

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Self-focused electron beams from pyroelectric LiNbO₃ crystals and their pattern-replication capability