Roles of the first atomic layers in growth of SrTiO3 films on LaAlO3 substrates

Dong Wook Kim; Dae Ho Kim; Bo Soo Kang; T. W. Noh; D. R. Lee; K. B. Lee

doi:10.1063/1.123792

Roles of the first atomic layers in growth of SrTiO₃ films on LaAlO₃ substrates

Dong Wook Kim, Dae Ho Kim, Bo Soo Kang, T. W. Noh, D. R. Lee, K. B. Lee

Department of Physics

Research output: Contribution to journal › Article › peer-review

54 Scopus citations

Abstract

The roles of the first atomic layer for growth of heterostructures composed of the same AlO₂-type perovskite crystal structures were investigated. LAO(001) single crystals were annealed at 1000-1100 °C for 10 hours under a flowing oxygen atmosphere and then transferred to a growth chamber. Reflection high energy electron diffraction (RHEED) and atomic force microscope (AFM) measurements revealed that the substrate had very clean and atomically flat surfaces. Related growth behaviors and structural properties of the films were characterized by RHEED, AFM, and high resolution X-ray diffraction (XRD) measurements.

Original language	English
Pages (from-to)	2176-2178
Number of pages	3
Journal	Applied Physics Letters
Volume	74
Issue number	15
DOIs	https://doi.org/10.1063/1.123792
State	Published - 12 Apr 1999

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abstract = "The roles of the first atomic layer for growth of heterostructures composed of the same AlO2-type perovskite crystal structures were investigated. LAO(001) single crystals were annealed at 1000-1100 °C for 10 hours under a flowing oxygen atmosphere and then transferred to a growth chamber. Reflection high energy electron diffraction (RHEED) and atomic force microscope (AFM) measurements revealed that the substrate had very clean and atomically flat surfaces. Related growth behaviors and structural properties of the films were characterized by RHEED, AFM, and high resolution X-ray diffraction (XRD) measurements.",

author = "Kim, {Dong Wook} and Kim, {Dae Ho} and Kang, {Bo Soo} and Noh, {T. W.} and Lee, {D. R.} and Lee, {K. B.}",

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AU - Kim, Dong Wook

AU - Kim, Dae Ho

AU - Kang, Bo Soo

AU - Noh, T. W.

AU - Lee, D. R.

AU - Lee, K. B.

PY - 1999/4/12

Y1 - 1999/4/12

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AB - The roles of the first atomic layer for growth of heterostructures composed of the same AlO2-type perovskite crystal structures were investigated. LAO(001) single crystals were annealed at 1000-1100 °C for 10 hours under a flowing oxygen atmosphere and then transferred to a growth chamber. Reflection high energy electron diffraction (RHEED) and atomic force microscope (AFM) measurements revealed that the substrate had very clean and atomically flat surfaces. Related growth behaviors and structural properties of the films were characterized by RHEED, AFM, and high resolution X-ray diffraction (XRD) measurements.

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 15

ER -

Roles of the first atomic layers in growth of SrTiO3 films on LaAlO3 substrates

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Roles of the first atomic layers in growth of SrTiO₃ films on LaAlO₃ substrates