The barium strontium titanate (BST) thin films grown on 4-inch Si substrates by metal-organic chemical vapor deposition were characterized using x-ray fluorescence (XRF) spectrometry. The methodology established in this study demonstrates the application of XRF to the compositional and thickness analyses of BST films. Thin film standards were exploited for the XRF fundamental parameter program. The film uniformity could be examined by mapping the wafer on the Y-theta stage.
|Journal||Journal of the Korean Physical Society|
|Issue number||4 SUPPL.|
|State||Published - 1998|