Quantitative X-ray fluorescence characterization of BST films grown by MOCVD

Hyun Ja Kwon; William Jo; Hyun Ha Kim; Young Woo Jeong; Jeong Soo Lee; Hak Ro Yoon; In Seung Ban; James R. Bogert

Quantitative X-ray fluorescence characterization of BST films grown by MOCVD

Hyun Ja Kwon, William Jo, Hyun Ha Kim, Young Woo Jeong, Jeong Soo Lee, Hak Ro Yoon, In Seung Ban, James R. Bogert

Department of Physics

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

The barium strontium titanate (BST) thin films grown on 4-inch Si substrates by metal-organic chemical vapor deposition were characterized using x-ray fluorescence (XRF) spectrometry. The methodology established in this study demonstrates the application of XRF to the compositional and thickness analyses of BST films. Thin film standards were exploited for the XRF fundamental parameter program. The film uniformity could be examined by mapping the wafer on the Y-theta stage.

Original language	English
Pages (from-to)	S1559-S1561
Journal	Journal of the Korean Physical Society
Volume	32
Issue number	4 SUPPL.
State	Published - 1998

Cite this

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title = "Quantitative X-ray fluorescence characterization of BST films grown by MOCVD",

abstract = "The barium strontium titanate (BST) thin films grown on 4-inch Si substrates by metal-organic chemical vapor deposition were characterized using x-ray fluorescence (XRF) spectrometry. The methodology established in this study demonstrates the application of XRF to the compositional and thickness analyses of BST films. Thin film standards were exploited for the XRF fundamental parameter program. The film uniformity could be examined by mapping the wafer on the Y-theta stage.",

author = "Kwon, {Hyun Ja} and William Jo and Kim, {Hyun Ha} and Jeong, {Young Woo} and Lee, {Jeong Soo} and Yoon, {Hak Ro} and Ban, {In Seung} and Bogert, {James R.}",

year = "1998",

language = "English",

volume = "32",

pages = "S1559--S1561",

journal = "Journal of the Korean Physical Society",

issn = "0374-4884",

publisher = "Korean Physical Society",

number = "4 SUPPL.",

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T1 - Quantitative X-ray fluorescence characterization of BST films grown by MOCVD

AU - Kwon, Hyun Ja

AU - Jo, William

AU - Kim, Hyun Ha

AU - Jeong, Young Woo

AU - Lee, Jeong Soo

AU - Yoon, Hak Ro

AU - Ban, In Seung

AU - Bogert, James R.

PY - 1998

Y1 - 1998

N2 - The barium strontium titanate (BST) thin films grown on 4-inch Si substrates by metal-organic chemical vapor deposition were characterized using x-ray fluorescence (XRF) spectrometry. The methodology established in this study demonstrates the application of XRF to the compositional and thickness analyses of BST films. Thin film standards were exploited for the XRF fundamental parameter program. The film uniformity could be examined by mapping the wafer on the Y-theta stage.

AB - The barium strontium titanate (BST) thin films grown on 4-inch Si substrates by metal-organic chemical vapor deposition were characterized using x-ray fluorescence (XRF) spectrometry. The methodology established in this study demonstrates the application of XRF to the compositional and thickness analyses of BST films. Thin film standards were exploited for the XRF fundamental parameter program. The film uniformity could be examined by mapping the wafer on the Y-theta stage.

UR - http://www.scopus.com/inward/record.url?scp=0000706191&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0000706191

SN - 0374-4884

VL - 32

SP - S1559-S1561

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

IS - 4 SUPPL.

ER -

Quantitative X-ray fluorescence characterization of BST films grown by MOCVD

Abstract

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