Quantitative X-ray fluorescence characterization of BST films grown by MOCVD

Hyun Ja Kwon, William Jo, Hyun Ha Kim, Young Woo Jeong, Jeong Soo Lee, Hak Ro Yoon, In Seung Ban, James R. Bogert

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


The barium strontium titanate (BST) thin films grown on 4-inch Si substrates by metal-organic chemical vapor deposition were characterized using x-ray fluorescence (XRF) spectrometry. The methodology established in this study demonstrates the application of XRF to the compositional and thickness analyses of BST films. Thin film standards were exploited for the XRF fundamental parameter program. The film uniformity could be examined by mapping the wafer on the Y-theta stage.

Original languageEnglish
Pages (from-to)S1559-S1561
JournalJournal of the Korean Physical Society
Issue number4 SUPPL.
StatePublished - 1998


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