Pyroelectric emission lithography

D. W. Kim, C. W. Moon, In K. Yoo, Gil Rosenman

Research output: Contribution to journalArticlepeer-review

7 Scopus citations


Pyroelectric emission under high vacuum conditions was studied for +Z-faced LiNbO3 (LN) single crystals, It was confirmed that electrons were emitted from the bare LN surface during heating. Electrons were emitted even from LN surfaces coated with 100 nm thick SiO2 films. No emission was observed from LN single crystals covered with metal films. Patterns were made on the LN surface with Ti film (blocking layer) and SiO2 film (emission layer). The pattern image was transferred to electron-beam resist under magnetic field.

Original languageEnglish
Pages (from-to)S1196-S1198
JournalJournal of the Korean Physical Society
Issue numberSUPPL.
StatePublished - Apr 2003


  • LiNbO
  • Lithography
  • Pyroelectric electron emission


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