Pyroelectric emission lithography

D. W. Kim; C. W. Moon; In K. Yoo; Gil Rosenman

Pyroelectric emission lithography

D. W. Kim, C. W. Moon, In K. Yoo, Gil Rosenman

Department of Physics

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

Pyroelectric emission under high vacuum conditions was studied for +Z-faced LiNbO₃ (LN) single crystals, It was confirmed that electrons were emitted from the bare LN surface during heating. Electrons were emitted even from LN surfaces coated with 100 nm thick SiO₂ films. No emission was observed from LN single crystals covered with metal films. Patterns were made on the LN surface with Ti film (blocking layer) and SiO₂ film (emission layer). The pattern image was transferred to electron-beam resist under magnetic field.

Original language	English
Pages (from-to)	S1196-S1198
Journal	Journal of the Korean Physical Society
Volume	42
Issue number	SUPPL.
State	Published - Apr 2003

Keywords

LiNbO
Lithography
Pyroelectric electron emission

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@article{ee04998379b74ea3b942b2b39927625a,

title = "Pyroelectric emission lithography",

abstract = "Pyroelectric emission under high vacuum conditions was studied for +Z-faced LiNbO3 (LN) single crystals, It was confirmed that electrons were emitted from the bare LN surface during heating. Electrons were emitted even from LN surfaces coated with 100 nm thick SiO2 films. No emission was observed from LN single crystals covered with metal films. Patterns were made on the LN surface with Ti film (blocking layer) and SiO2 film (emission layer). The pattern image was transferred to electron-beam resist under magnetic field.",

keywords = "LiNbO, Lithography, Pyroelectric electron emission",

author = "Kim, {D. W.} and Moon, {C. W.} and Yoo, {In K.} and Gil Rosenman",

year = "2003",

month = apr,

language = "English",

volume = "42",

pages = "S1196--S1198",

journal = "Journal of the Korean Physical Society",

issn = "0374-4884",

publisher = "Korean Physical Society",

number = "SUPPL.",

}

TY - JOUR

T1 - Pyroelectric emission lithography

AU - Kim, D. W.

AU - Moon, C. W.

AU - Yoo, In K.

AU - Rosenman, Gil

PY - 2003/4

Y1 - 2003/4

N2 - Pyroelectric emission under high vacuum conditions was studied for +Z-faced LiNbO3 (LN) single crystals, It was confirmed that electrons were emitted from the bare LN surface during heating. Electrons were emitted even from LN surfaces coated with 100 nm thick SiO2 films. No emission was observed from LN single crystals covered with metal films. Patterns were made on the LN surface with Ti film (blocking layer) and SiO2 film (emission layer). The pattern image was transferred to electron-beam resist under magnetic field.

AB - Pyroelectric emission under high vacuum conditions was studied for +Z-faced LiNbO3 (LN) single crystals, It was confirmed that electrons were emitted from the bare LN surface during heating. Electrons were emitted even from LN surfaces coated with 100 nm thick SiO2 films. No emission was observed from LN single crystals covered with metal films. Patterns were made on the LN surface with Ti film (blocking layer) and SiO2 film (emission layer). The pattern image was transferred to electron-beam resist under magnetic field.

KW - LiNbO

KW - Lithography

KW - Pyroelectric electron emission

UR - http://www.scopus.com/inward/record.url?scp=4444352030&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:4444352030

SN - 0374-4884

VL - 42

SP - S1196-S1198

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

IS - SUPPL.

ER -

Pyroelectric emission lithography

Abstract

Keywords

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