SrRuO3 thin films have been grown in-situ on LaAlO3 and textured metal templates by pulsed laser deposition. Deposition was carried out between 3 mTorr to 300 mTorr of oxygen partial pressure with laser repetition rate of 5 Hz. Substrate temperature was between 500 and 800°C. Dependence of out-of plane orientation of SrRuO3 thin films on pressure and growth temperature is investigated by X-ray diffraction. The surface morphology and grain growth behaviors of SrRuO3 thin films are analysed by atomic force microscopy. In addition, a ferromagnetic transition at ∼ 150 K of SrRuO3 films on LaAlO3 is detected by resistivity and magnetization measurement.
Bibliographical noteFunding Information:
Manuscript received August 29, 2006. This work was supported by the Center for Applied Superconductivity Technology, 21st Century Frontier R&D Program, funded by the Ministry of Science and Technology, Korea. M. R. Choi, H. R. Yoon, T. Y. Kim, and J. H. Lee are with the Department of Physics, Ewha Womans University, Seoul 120-750, Korea. W. Jo is with the Department of Physics and the Division of Nanosciences, Ewha Womans University, Seoul 120-750, Korea (e-mail: firstname.lastname@example.org). Y. M. Kang and S. I. Yoo are with the School of Materials Science and Engineering, Seoul National University, Seoul 151-742, Korea. Y. S. Oh and K. H. Kim are with the Department of Physics, Seoul National University, Seoul 151-742, Korea. H. S. Ha and S. S. Oh are with Korea Electrotechnology Research Institute, Changwon, Kyungsang-Namdo, Korea. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TASC.2007.899420
- Coated conductors
- Pulsed laser deposition
- SrRuO buffer layers