Properties of indium tin oxide thin films prepared on the oxygen plasma-treated polycarbonate substrate

Yu Sup Jung; Woo Jae Kim; Hyung Wook Choi; Yong Seo Park; Kyung Hwan Kim

doi:10.1016/j.tsf.2011.01.407

Properties of indium tin oxide thin films prepared on the oxygen plasma-treated polycarbonate substrate

Yu Sup Jung, Woo Jae Kim, Hyung Wook Choi, Yong Seo Park, Kyung Hwan Kim

Department of Chemical Engineering & Materials Science

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

We prepared the indium tin oxide thin (ITO) film on the polymer substrate by using facing target sputtering method. To obtain a smooth surface of the ITO thin film for application of OLEDs, before deposition of the ITO thin film, the polymer substrate was given plasma surface treatment. The electrical and surface properties were measured by a Hall Effect measurement and a contact angle measurement. The structural and optical properties were evaluated by an X-ray diffractometer, an atomic force microscope and a UV/VIS spectrometer, respectively. All ITO thin films deposited on plasma-treated polymer substrate showed an average transmittance over 85% in visible range, and the lowest resistivity was 4.17 × 10^{- 4} ωcm.

Original language	English
Pages (from-to)	6844-6848
Number of pages	5
Journal	Thin Solid Films
Volume	519
Issue number	20
DOIs	https://doi.org/10.1016/j.tsf.2011.01.407
State	Published - 1 Aug 2011

Bibliographical note

Funding Information:
This work was supported by the Human Resources Development of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Knowledge Economy (No. 20104010100510 ).

Funding Information:
This work was supported by the Kyungwon University Research Fund in 2011.

Keywords

FTS
ITO
Plasma surface treatment
Polymer

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title = "Properties of indium tin oxide thin films prepared on the oxygen plasma-treated polycarbonate substrate",

abstract = "We prepared the indium tin oxide thin (ITO) film on the polymer substrate by using facing target sputtering method. To obtain a smooth surface of the ITO thin film for application of OLEDs, before deposition of the ITO thin film, the polymer substrate was given plasma surface treatment. The electrical and surface properties were measured by a Hall Effect measurement and a contact angle measurement. The structural and optical properties were evaluated by an X-ray diffractometer, an atomic force microscope and a UV/VIS spectrometer, respectively. All ITO thin films deposited on plasma-treated polymer substrate showed an average transmittance over 85% in visible range, and the lowest resistivity was 4.17 × 10- 4 ωcm.",

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author = "Jung, {Yu Sup} and Kim, {Woo Jae} and Choi, {Hyung Wook} and Park, {Yong Seo} and Kim, {Kyung Hwan}",

note = "Funding Information: This work was supported by the Human Resources Development of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Knowledge Economy (No. 20104010100510 ). Funding Information: This work was supported by the Kyungwon University Research Fund in 2011.",

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AU - Kim, Woo Jae

AU - Choi, Hyung Wook

AU - Park, Yong Seo

AU - Kim, Kyung Hwan

N1 - Funding Information: This work was supported by the Human Resources Development of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Knowledge Economy (No. 20104010100510 ). Funding Information: This work was supported by the Kyungwon University Research Fund in 2011.

PY - 2011/8/1

Y1 - 2011/8/1

N2 - We prepared the indium tin oxide thin (ITO) film on the polymer substrate by using facing target sputtering method. To obtain a smooth surface of the ITO thin film for application of OLEDs, before deposition of the ITO thin film, the polymer substrate was given plasma surface treatment. The electrical and surface properties were measured by a Hall Effect measurement and a contact angle measurement. The structural and optical properties were evaluated by an X-ray diffractometer, an atomic force microscope and a UV/VIS spectrometer, respectively. All ITO thin films deposited on plasma-treated polymer substrate showed an average transmittance over 85% in visible range, and the lowest resistivity was 4.17 × 10- 4 ωcm.

AB - We prepared the indium tin oxide thin (ITO) film on the polymer substrate by using facing target sputtering method. To obtain a smooth surface of the ITO thin film for application of OLEDs, before deposition of the ITO thin film, the polymer substrate was given plasma surface treatment. The electrical and surface properties were measured by a Hall Effect measurement and a contact angle measurement. The structural and optical properties were evaluated by an X-ray diffractometer, an atomic force microscope and a UV/VIS spectrometer, respectively. All ITO thin films deposited on plasma-treated polymer substrate showed an average transmittance over 85% in visible range, and the lowest resistivity was 4.17 × 10- 4 ωcm.

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JO - Thin Solid Films

JF - Thin Solid Films

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ER -

Properties of indium tin oxide thin films prepared on the oxygen plasma-treated polycarbonate substrate

Abstract

Bibliographical note

Keywords

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