Properties of (Ba,Sr)TiO3 thin films prepared by liquid-source delivery chemical vapor deposition

D. C. Kim, W. Jo, H. M. Lee, K. Y. Kim

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


(Ba,Sr)TiO3 thin films were grown by liquid-source delivery chemical vapor deposition. Over a wide range of substrate temperature, the films were grown and their structural and electrical properties were investigated. Atomic ratio of Ba, Sr, and Ti is found to be strongly dependent on the substrate temperature. Electron microscopic studies show that surface roughness and step coverage of the films are also closely related to the substrate temperature. Dielectric constant and dissipation loss of the films were measured as 200 and 1 % over the frequency range of 100 Hz ∼ 1 MHz, respectively. To obtain a higher dielectric BST thin film, N2O ambient gas was used during the deposition.

Original languageEnglish
Pages (from-to)137-144
Number of pages8
JournalIntegrated Ferroelectrics
Issue number1-4
StatePublished - 1997


  • BST thin films
  • Chemical vapor deposition
  • Liquid-source delivery
  • NO ambient gas
  • Substrate temperature


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