Program efficiency relying on channel conditions at NOR-Type flash memory device based on silicon-on-insulator (SOI)

Seongjae Cho, Il Han Park, Jung Hoon Lee, Jong Duk Lee, Byung Gook Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Various types of flash memory devices are fabricated on silicon-on-insulator (SOI) substrate for efficient isolation and higher program efficiency nowadays. Since metal-oxide-semiconductor field effect transistors (MOSFETs) on SOI has a floating body and corresponding effects, it is quite difficult to predict the program efficiency of SOI-based NOR-type flash memory device making use of channel hot electron injection (CHEI) mechanism in program operation. The program efficiency is hard to control by back substrate bias unlike bulk silicon-based memory device, either. In this work, the dependence of program efficiency for SOI-based NOR-type flash memory device on channel conditions with regard to SOI thickness and channel doping concentration is thoroughly investigated by numerical simulation.

Original languageEnglish
Title of host publication2008 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC
DOIs
StatePublished - 2008
Event2008 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC - Hong Kong, China
Duration: 8 Dec 200810 Dec 2008

Publication series

Name2008 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC

Conference

Conference2008 IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC
Country/TerritoryChina
CityHong Kong
Period8/12/0810/12/08

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