Position error inspection for mounting wafer in cleaning device using the radial shape board

Jung Woo Lee, Byung Gook Lee, Joon Jea Lee, Jungho Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, we propose a wafer position error recognition system using computer vision technology and radial shape board. Wafer is one of the material when create the semiconductor. Wafer must be cleaned by the chemical during creating the semiconductor process .In this step, the robot moves wafer into the cleaning system. But sometime, the robot puts the wafer into an incorrect location. In this case, the trouble of cleaning system may be caused by the incorrect position, even the wafer can be broken. To prevent this case, we are going to find the wafer position in cleaning system using the computer vision technology. We perform the calibration and image processing for knowing the correct position of wafer. In calibration process, we are going to use the radial shape board.

Original languageEnglish
Title of host publicationProceedings - 2009 2nd International Conference in Visualisation, VIZ 2009
Pages247-252
Number of pages6
DOIs
StatePublished - 2009
Event2009 2nd International Conference in Visualisation, VIZ 2009 - Barcelona, Spain
Duration: 15 Jul 200917 Jul 2009

Publication series

NameProceedings - 2009 2nd International Conference in Visualisation, VIZ 2009

Conference

Conference2009 2nd International Conference in Visualisation, VIZ 2009
Country/TerritorySpain
CityBarcelona
Period15/07/0917/07/09

Keywords

  • Calibration
  • Cleaning system
  • Radial shape board
  • Wafer

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