Permittivity measurement for biological application using micromachined probe

Jung Mu Kim; Dong Hoon Oh; Jae Hyoung Park; Jei Won Cho; Youngwoo Kwon; Changyul Cheon; Yong Kweon Kim

doi:10.1109/MWSYM.2005.1517076

Permittivity measurement for biological application using micromachined probe

Jung Mu Kim, Dong Hoon Oh, Jae Hyoung Park, Jei Won Cho, Youngwoo Kwon, Changyul Cheon, Yong Kweon Kim

Divison of Brain & Cognitive Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

6 Scopus citations

Abstract

We implemented a micromachined probe for the measurement of biological properties using MEMS technology. We experimentally showed the suitability of the micromachined probe in biological applications through liquids and solid experiments. The micromachined probe consists of a CPW and strip line between Benzo Cyclo Butene (BCB) layers because it has excellent properties such as high resistivity, low loss tangent and low permittivity at higher frequencies. The aperture size of the micromachined probe is only 650 μm × 70 μm. We measured the permittivity of a number of well- known liquids - 0.5, 0.9 and 1.3 % saline, acetone, and muscle and fat of pork - as biological samples using the micromachined probe after liquid calibration. In this paper, we first demonstrate that the micromachined probe can provide broadband measurement of measurable solid materials, such as biological samples, and also of well- known liquids at microwave frequencies.

Original language	English
Title of host publication	2005 IEEE MTT-S International Microwave Symposium Digest
Pages	1809-1812
Number of pages	4
DOIs	https://doi.org/10.1109/MWSYM.2005.1517076
State	Published - 2005
Event	2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States Duration: 12 Jun 2005 → 17 Jun 2005

Publication series

Name	IEEE MTT-S International Microwave Symposium Digest
Volume	2005
ISSN (Print)	0149-645X

Conference

Conference	2005 IEEE MTT-S International Microwave Symposium
Country/Territory	United States
City	Long Beach, CA
Period	12/06/05 → 17/06/05

Keywords

MEMS
Micromachined probe
Permittivity measurement

Access to Document

10.1109/MWSYM.2005.1517076

Cite this

Kim, J. M., Oh, D. H., Park, J. H., Cho, J. W., Kwon, Y., Cheon, C., & Kim, Y. K. (2005). Permittivity measurement for biological application using micromachined probe. In 2005 IEEE MTT-S International Microwave Symposium Digest (pp. 1809-1812). Article 1517076 (IEEE MTT-S International Microwave Symposium Digest; Vol. 2005). https://doi.org/10.1109/MWSYM.2005.1517076

@inproceedings{67caeb434e394161805214de4ea84a63,

title = "Permittivity measurement for biological application using micromachined probe",

abstract = "We implemented a micromachined probe for the measurement of biological properties using MEMS technology. We experimentally showed the suitability of the micromachined probe in biological applications through liquids and solid experiments. The micromachined probe consists of a CPW and strip line between Benzo Cyclo Butene (BCB) layers because it has excellent properties such as high resistivity, low loss tangent and low permittivity at higher frequencies. The aperture size of the micromachined probe is only 650 μm × 70 μm. We measured the permittivity of a number of well- known liquids - 0.5, 0.9 and 1.3 % saline, acetone, and muscle and fat of pork - as biological samples using the micromachined probe after liquid calibration. In this paper, we first demonstrate that the micromachined probe can provide broadband measurement of measurable solid materials, such as biological samples, and also of well- known liquids at microwave frequencies.",

keywords = "MEMS, Micromachined probe, Permittivity measurement",

author = "Kim, {Jung Mu} and Oh, {Dong Hoon} and Park, {Jae Hyoung} and Cho, {Jei Won} and Youngwoo Kwon and Changyul Cheon and Kim, {Yong Kweon}",

year = "2005",

doi = "10.1109/MWSYM.2005.1517076",

language = "English",

isbn = "0780388461",

series = "IEEE MTT-S International Microwave Symposium Digest",

pages = "1809--1812",

booktitle = "2005 IEEE MTT-S International Microwave Symposium Digest",

note = "2005 IEEE MTT-S International Microwave Symposium ; Conference date: 12-06-2005 Through 17-06-2005",

}

Kim, JM, Oh, DH, Park, JH, Cho, JW, Kwon, Y, Cheon, C & Kim, YK 2005, Permittivity measurement for biological application using micromachined probe. in 2005 IEEE MTT-S International Microwave Symposium Digest., 1517076, IEEE MTT-S International Microwave Symposium Digest, vol. 2005, pp. 1809-1812, 2005 IEEE MTT-S International Microwave Symposium, Long Beach, CA, United States, 12/06/05. https://doi.org/10.1109/MWSYM.2005.1517076

Permittivity measurement for biological application using micromachined probe. / Kim, Jung Mu; Oh, Dong Hoon; Park, Jae Hyoung et al.
2005 IEEE MTT-S International Microwave Symposium Digest. 2005. p. 1809-1812 1517076 (IEEE MTT-S International Microwave Symposium Digest; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Cheon, Changyul

AU - Kim, Yong Kweon

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N2 - We implemented a micromachined probe for the measurement of biological properties using MEMS technology. We experimentally showed the suitability of the micromachined probe in biological applications through liquids and solid experiments. The micromachined probe consists of a CPW and strip line between Benzo Cyclo Butene (BCB) layers because it has excellent properties such as high resistivity, low loss tangent and low permittivity at higher frequencies. The aperture size of the micromachined probe is only 650 μm × 70 μm. We measured the permittivity of a number of well- known liquids - 0.5, 0.9 and 1.3 % saline, acetone, and muscle and fat of pork - as biological samples using the micromachined probe after liquid calibration. In this paper, we first demonstrate that the micromachined probe can provide broadband measurement of measurable solid materials, such as biological samples, and also of well- known liquids at microwave frequencies.

AB - We implemented a micromachined probe for the measurement of biological properties using MEMS technology. We experimentally showed the suitability of the micromachined probe in biological applications through liquids and solid experiments. The micromachined probe consists of a CPW and strip line between Benzo Cyclo Butene (BCB) layers because it has excellent properties such as high resistivity, low loss tangent and low permittivity at higher frequencies. The aperture size of the micromachined probe is only 650 μm × 70 μm. We measured the permittivity of a number of well- known liquids - 0.5, 0.9 and 1.3 % saline, acetone, and muscle and fat of pork - as biological samples using the micromachined probe after liquid calibration. In this paper, we first demonstrate that the micromachined probe can provide broadband measurement of measurable solid materials, such as biological samples, and also of well- known liquids at microwave frequencies.

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Permittivity measurement for biological application using micromachined probe

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