Abstract
We describe the design, fabrication, and experimental results of a raster scanning laser display system using micromachined electrostatic scanning micromirror. The micromirror is comprised of a diaphragm mirror plate supported by an array of diamond shaped support frame, and movable comb electrodes. A prototype raster scanning laser display system using the fabricated micromirror, having optical scan angle of 16.9° at resonance frequency of 19.55 kHz, as the horizontal scanner was developed and tested. To compensate for the nonlinear characteristics of the scanner, a simple image correction method was developed, and the projected image was analyzed and compared with the simulation results.
| Original language | English |
|---|---|
| Pages (from-to) | 1702-1704 |
| Number of pages | 3 |
| Journal | IEEE Photonics Technology Letters |
| Volume | 18 |
| Issue number | 16 |
| DOIs | |
| State | Published - 15 Aug 2006 |
Keywords
- Laser display
- Raster scanning
- Scanning micromirror