Abstract
We describe the design, fabrication, and experimental results of a raster scanning laser display system using micromachined electrostatic scanning micromirror. The micromirror is comprised of a diaphragm mirror plate supported by an array of diamond shaped support frame, and movable comb electrodes. A prototype raster scanning laser display system using the fabricated micromirror, having optical scan angle of 16.9° at resonance frequency of 19.55 kHz, as the horizontal scanner was developed and tested. To compensate for the nonlinear characteristics of the scanner, a simple image correction method was developed, and the projected image was analyzed and compared with the simulation results.
Original language | English |
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Pages (from-to) | 1702-1704 |
Number of pages | 3 |
Journal | IEEE Photonics Technology Letters |
Volume | 18 |
Issue number | 16 |
DOIs | |
State | Published - 15 Aug 2006 |
Keywords
- Laser display
- Raster scanning
- Scanning micromirror