Pattern-dependent charging in plasmas: Electron temperature effects

Gyeong S. Hwang, Konstantinos P. Giapis

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

The differential charging of high-aspect-ratio dense structures during plasma etching is studied by two-dimensional Monte Carlo simulations. Enhanced electron shadowing at large electron temperatures is found to reduce the electron current density to the bottom of narrow trenches, causing buildup of large charging potentials on dielectric surfaces. These potentials alter the local ion dynamics, increase the flux of deflected ions towards the sidewalls, and result in distorted profiles. The simulation results capture reported experimental trends and reveal the physics of charging damage.

Original languageEnglish
Pages (from-to)845-848
Number of pages4
JournalPhysical Review Letters
Volume79
Issue number5
DOIs
StatePublished - 1 Jan 1997

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