Pattern-dependent charging damage in high density plasma processes

Gyeong Soon Hwang

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	56-57
Number of pages	2
Journal	Electrochemical Society Interface
Volume	7
Issue number	4
State	Published - Dec 1998

Cite this

@article{707a12cb46854eeb8b816390eaba1ef7,

title = "Pattern-dependent charging damage in high density plasma processes",

author = "Hwang, {Gyeong Soon}",

year = "1998",

month = dec,

language = "English",

volume = "7",

pages = "56--57",

journal = "Electrochemical Society Interface",

issn = "1064-8208",

publisher = "Institute of Physics Publishing",

number = "4",

}

TY - JOUR

T1 - Pattern-dependent charging damage in high density plasma processes

AU - Hwang, Gyeong Soon

PY - 1998/12

Y1 - 1998/12

UR - http://www.scopus.com/inward/record.url?scp=0032314974&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0032314974

SN - 1064-8208

VL - 7

SP - 56

EP - 57

JO - Electrochemical Society Interface

JF - Electrochemical Society Interface

IS - 4

ER -