Abstract
The catalytic particle size dependence of chemical vapor deposition (CVD) growth of multiwall carbon nanotubes (MWNT) was investigated using C2H2 and C60 as carbon feedstock gases. Catalytic iron films of controlled thickness between 0.5 and 20 nm were deposited on a clean SiO2 surface. Atomic force microscope (AFM) imaging of the annealed iron films was used to determine the iron particle size distributions. It was concluded that for thermal CVD methods using Fe as the catalyst metal, the MWNT size distribution is only slightly sensitive to the catalysts size in the range of ten to a few hundred nm.
Original language | English |
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Pages (from-to) | 4185-4190 |
Number of pages | 6 |
Journal | Journal of Applied Physics |
Volume | 93 |
Issue number | 7 |
DOIs | |
State | Published - 1 Apr 2003 |