Abstract
In this research, a novel dual workfunction (DWF) line tunnel field-effect transistor (LTFET) is optimized by using high WF gate-drain underlap and low WF gate-source underlap. Through numerical technology computer-aided design (TCAD) device simulations, it is confirmed that on-current (ION) can be increased by highly localized point tunneling while suppressing off-current (IOFF) by adjusting the distance between low-WF gate and source junction. Considering on-off current ratio (ION/IOFF) and the process variation, the distance between high-WF gate and source junction is optimized to be 3 to 5 nm.
Original language | English |
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Pages (from-to) | 207-214 |
Number of pages | 8 |
Journal | Journal of Semiconductor Technology and Science |
Volume | 23 |
Issue number | 4 |
DOIs | |
State | Published - Aug 2023 |
Bibliographical note
Publisher Copyright:© 2023, Institute of Electronics Engineers of Korea. All rights reserved.
Keywords
- Dual workfunction
- TCAD device simulation
- junction underlap
- line tunneling field-effect transistor (LTFET)
- low-power operation