CeO2 thin films were grown on MgO(001) single-crystal substrates by pulsed laser deposition. The CeO2 thin films were used as a cladding layer of a Bi4Ti3O12 thin film waveguide. Structural properties of the BTO/CeO2MgO heterostructures were investigated using x-ray diffraction techniques. An epitaxial relationship of BTO(001)//CeO2(001)//MgO(001) and BTO//CeO2//MgO was confirmed. From the epitaxial heterostructure, a ridge waveguide was fabricated by photolithographic and ion-milling techniques. An single-mode near-field pattern was observed using an end-fire coupling method.
|Number of pages||6|
|Journal||Materials Research Society Symposium - Proceedings|
|State||Published - 1996|
|Event||Proceedings of the 1995 MRS Fall Symposium - Boston, MA, USA|
Duration: 27 Nov 1995 → 30 Nov 1995