Optical MEMS: From micromirrors to complex systems

Engineering

• Micromirrors 100%
• Optical Systems 100%
• Nanomaterial 50%
• Pneumatics 50%
• Surface Micro-Machining 50%
• Integrated System 50%
• Biomedical Device 50%
• System Technology 50%
• Microfabrication Technique 50%
• Optical Switch 50%
• Application Area 50%
• Functionals 50%
• Mechanical Stability 50%
• Optical Filter 50%
• Actuator 50%

Material Science

• Optical Device 100%
• Mechanical Stability 50%
• Actuator 50%
• Micromachining 50%
• Microfabrication 50%
• Microelectromechanical System Sensor 50%
• Nanostructure 50%
• Photonic Crystal 50%
• Glass Fiber 50%