Skip to main navigation
Skip to search
Skip to main content
Ewha Womans University Home
Search content at Ewha Womans University
Home
Profiles
Research units
Projects
Research output
Prizes
Activities
Press/Media
Optical MEMS: From micromirrors to complex systems
Olav Solgaard
, Asif A. Godil
, Roger T. Howe
, Luke P. Lee
, Yves Alain Peter
, Hans Zappe
Department of Chemistry & Nanoscience
Research output
:
Contribution to journal
›
Article
›
peer-review
164
Scopus citations
Overview
Fingerprint
Fingerprint
Dive into the research topics of 'Optical MEMS: From micromirrors to complex systems'. Together they form a unique fingerprint.
Sort by
Weight
Alphabetically
Engineering
Micromirrors
100%
Optical Systems
100%
Nanomaterial
50%
Pneumatics
50%
Surface Micro-Machining
50%
Integrated System
50%
Biomedical Device
50%
System Technology
50%
Microfabrication Technique
50%
Optical Switch
50%
Application Area
50%
Functionals
50%
Mechanical Stability
50%
Optical Filter
50%
Electrostatic Force
50%
Actuator
50%
Lens
50%
Material Science
Optical Device
100%
Mechanical Stability
50%
Actuator
50%
Micromachining
50%
Fiber Optics
50%
Microfabrication
50%
Microelectromechanical System Sensor
50%
Nanostructure
50%
Photonic Crystal
50%
Physics
Microelectromechanical System
100%
Optical Device
22%
Photonic Crystal
11%
Beam Steering
11%
Microfabrication
11%
Micromachining
11%
Electromagnetism
11%
Nanomaterial
11%
Actuator
11%
Lens
11%
Fiber Optic
11%
microcavity
11%
Systems Integration
11%
Pneumatics
11%