Optical charge-pumping: A universal trap characterization technique for nanoscale floating body devices

Sungho Kim, Sung Jin Choi, Dong Il Moon, Yang Kyu Choi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

A universal trap characterization technique for nanoscale floating body devices is demonstrated. It overcomes the limits of conventional charge pumping. Exploiting optically generated carriers, the interface trap density, the energy distribution of interface traps, and the bulk region trap density are extracted directly without additional fabrication techniques or the use of extra test patterns. The proposed technique can provide a trap analysis tool for a study of device reliability regardless of the device structure, material, or dimension.

Original languageEnglish
Title of host publication2011 Symposium on VLSI Technology, VLSIT 2011 - Digest of Technical Papers
Pages190-191
Number of pages2
StatePublished - 2011
Event2011 Symposium on VLSI Technology, VLSIT 2011 - Kyoto, Japan
Duration: 14 Jun 201116 Jun 2011

Publication series

NameDigest of Technical Papers - Symposium on VLSI Technology
ISSN (Print)0743-1562

Conference

Conference2011 Symposium on VLSI Technology, VLSIT 2011
Country/TerritoryJapan
CityKyoto
Period14/06/1116/06/11

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