A technique has been developed that allows the application of free-standing membranes of polymer adhesives used in microfabricated structures. The film is made free-standing by the application of the adhesive to a polymer template, followed by an adhesion step to a microfabricated substrate, and the final release of the film by the removal of the polymer template. It was found that the surface treatment used to treat the Teflon template made it adhere too strongly to the adhesive film for this application. The results show that Gel-Paks make a suitable template for the transference of polymer films over holes of at least micron size.
|Number of pages||5|
|Journal||Materials Research Society Symposium - Proceedings|
|State||Published - 1998|
|Event||Proceedings of the 1998 MRS Spring Symposium - San Francisco, CA, USA|
Duration: 13 Apr 1998 → 16 Apr 1998