Novel low-cost planar probes with broadside apertures for nondestructive dielectric measurement of biological materials at microwave frequencies

Byoungjoong Kang; Jae Hyoung Park; Jeiwon Cho; Kihyun Kwon; Sungkyu Lim; Jeonghoon Yoon; Changyul Cheon; Yong Kweon Kim; Youngwoo Kwon

doi:10.1109/TMTT.2004.839904

Novel low-cost planar probes with broadside apertures for nondestructive dielectric measurement of biological materials at microwave frequencies

Byoungjoong Kang, Jae Hyoung Park, Jeiwon Cho, Kihyun Kwon, Sungkyu Lim, Jeonghoon Yoon, Changyul Cheon, Yong Kweon Kim, Youngwoo Kwon

Divison of Brain & Cognitive Sciences

Research output: Contribution to journal › Article › peer-review

39 Scopus citations

Abstract

Novel planar-type probes were developed to demonstrate the possibility of replacing the existing high-cost open-ended coaxial probes. The planar probes of this study define an aperture on the broadside of the probe body. In this way, the contact area can be maximized and/or customized according to specific medical needs. The probes with various aperture sizes and shapes can also be fabricated simultaneously in a single batch process. Three probes are developed in this paper: a probe combining two laminates, a microelectromechanical systems (MEMS)-based probe with a single benzocyclobutene (BCB) layer on a quartz substrate, and another MEMS probe with two BCB layers defined on a silicon substrate. The third probe was specifically designed for monolithic integration with driving circuits on a single substrate. Limitations in the high-frequency performance of the planar probes were carefully studied, and higher order modes and incomplete shielding were found to be the main causes. The measurement results of each probe showed excellent compatibility with those of the open-ended coaxial probe up to almost 40 GHz. The proposed planar-type probes have great potentials for practical medical applications in view of low cost, disposability, and monolithic integration capability with the driving circuits.

Original language	English
Pages (from-to)	134-142
Number of pages	9
Journal	IEEE Transactions on Microwave Theory and Techniques
Volume	53
Issue number	1
DOIs	https://doi.org/10.1109/TMTT.2004.839904
State	Published - Jan 2005

Bibliographical note

Funding Information:
Manuscript received April 21, 2004; revised July 21, 2004. This work was supported by the Korean Ministry of Science and Technology under the Creative Research Initiative Program. An earlier version of this paper was presented at the 2004 IEEE Microwave Theory and Techniques Society (IEEE MTT-S) International Microwave Symposium (IMS).

Keywords

Biomedical application
Microelectromechanical systems (MEMS)
Nondestructive measurement
Planar-type probe

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10.1109/TMTT.2004.839904

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title = "Novel low-cost planar probes with broadside apertures for nondestructive dielectric measurement of biological materials at microwave frequencies",

abstract = "Novel planar-type probes were developed to demonstrate the possibility of replacing the existing high-cost open-ended coaxial probes. The planar probes of this study define an aperture on the broadside of the probe body. In this way, the contact area can be maximized and/or customized according to specific medical needs. The probes with various aperture sizes and shapes can also be fabricated simultaneously in a single batch process. Three probes are developed in this paper: a probe combining two laminates, a microelectromechanical systems (MEMS)-based probe with a single benzocyclobutene (BCB) layer on a quartz substrate, and another MEMS probe with two BCB layers defined on a silicon substrate. The third probe was specifically designed for monolithic integration with driving circuits on a single substrate. Limitations in the high-frequency performance of the planar probes were carefully studied, and higher order modes and incomplete shielding were found to be the main causes. The measurement results of each probe showed excellent compatibility with those of the open-ended coaxial probe up to almost 40 GHz. The proposed planar-type probes have great potentials for practical medical applications in view of low cost, disposability, and monolithic integration capability with the driving circuits.",

keywords = "Biomedical application, Microelectromechanical systems (MEMS), Nondestructive measurement, Planar-type probe",

author = "Byoungjoong Kang and Park, {Jae Hyoung} and Jeiwon Cho and Kihyun Kwon and Sungkyu Lim and Jeonghoon Yoon and Changyul Cheon and Kim, {Yong Kweon} and Youngwoo Kwon",

note = "Funding Information: Manuscript received April 21, 2004; revised July 21, 2004. This work was supported by the Korean Ministry of Science and Technology under the Creative Research Initiative Program. An earlier version of this paper was presented at the 2004 IEEE Microwave Theory and Techniques Society (IEEE MTT-S) International Microwave Symposium (IMS).",

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AU - Kwon, Kihyun

AU - Lim, Sungkyu

AU - Yoon, Jeonghoon

AU - Cheon, Changyul

AU - Kim, Yong Kweon

AU - Kwon, Youngwoo

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N2 - Novel planar-type probes were developed to demonstrate the possibility of replacing the existing high-cost open-ended coaxial probes. The planar probes of this study define an aperture on the broadside of the probe body. In this way, the contact area can be maximized and/or customized according to specific medical needs. The probes with various aperture sizes and shapes can also be fabricated simultaneously in a single batch process. Three probes are developed in this paper: a probe combining two laminates, a microelectromechanical systems (MEMS)-based probe with a single benzocyclobutene (BCB) layer on a quartz substrate, and another MEMS probe with two BCB layers defined on a silicon substrate. The third probe was specifically designed for monolithic integration with driving circuits on a single substrate. Limitations in the high-frequency performance of the planar probes were carefully studied, and higher order modes and incomplete shielding were found to be the main causes. The measurement results of each probe showed excellent compatibility with those of the open-ended coaxial probe up to almost 40 GHz. The proposed planar-type probes have great potentials for practical medical applications in view of low cost, disposability, and monolithic integration capability with the driving circuits.

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Novel low-cost planar probes with broadside apertures for nondestructive dielectric measurement of biological materials at microwave frequencies

Abstract

Bibliographical note

Keywords

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