Novel planar-type probes were developed to demonstrate the possibility of replacing the existing high-cost open-ended coaxial probes. The planar probes of this study define an aperture on the broadside of the probe body. In this way, the contact area can be maximized and/or customized according to specific medical needs. The probes with various aperture sizes and shapes can also be fabricated simultaneously in a single batch process. Three probes are developed in this paper: a probe combining two laminates, a microelectromechanical systems (MEMS)-based probe with a single benzocyclobutene (BCB) layer on a quartz substrate, and another MEMS probe with two BCB layers defined on a silicon substrate. The third probe was specifically designed for monolithic integration with driving circuits on a single substrate. Limitations in the high-frequency performance of the planar probes were carefully studied, and higher order modes and incomplete shielding were found to be the main causes. The measurement results of each probe showed excellent compatibility with those of the open-ended coaxial probe up to almost 40 GHz. The proposed planar-type probes have great potentials for practical medical applications in view of low cost, disposability, and monolithic integration capability with the driving circuits.
|Number of pages||9|
|Journal||IEEE Transactions on Microwave Theory and Techniques|
|State||Published - Jan 2005|
- Biomedical application
- Microelectromechanical systems (MEMS)
- Nondestructive measurement
- Planar-type probe