New direction in nanotechnology: Cluster ion beam technique

V. N. Popok; S. V. Prasalovich; E. E.B. Campbell

doi:10.1109/CRMICO.2003.158920

New direction in nanotechnology: Cluster ion beam technique

V. N. Popok, S. V. Prasalovich, E. E.B. Campbell

Department of Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Ionised cluster beams are considered as a powerful and versatile tool for modification and processing of surfaces and near-surface layers as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion beams are discussed.

Original language	English
Title of host publication	2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	523-525
Number of pages	3
ISBN (Electronic)	966796826X, 9789667968267
DOIs	https://doi.org/10.1109/CRMICO.2003.158920
State	Published - 2003
Event	13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Sevastopol, Crimea, Ukraine Duration: 8 Sep 2003 → 12 Sep 2003

Publication series

Name	2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings true

Conference

Conference	13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003
Country/Territory	Ukraine
City	Sevastopol, Crimea
Period	8/09/03 → 12/09/03

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

Access to Document

10.1109/CRMICO.2003.158920

Cite this

Popok, V. N., Prasalovich, S. V., & Campbell, E. E. B. (2003). New direction in nanotechnology: Cluster ion beam technique. In 2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings (pp. 523-525). Article 1256606 (2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings true). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CRMICO.2003.158920

Popok, V. N. ; Prasalovich, S. V. ; Campbell, E. E.B. / New direction in nanotechnology : Cluster ion beam technique. 2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 523-525 (2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings true).

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abstract = "A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Ionised cluster beams are considered as a powerful and versatile tool for modification and processing of surfaces and near-surface layers as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion beams are discussed.",

author = "Popok, {V. N.} and Prasalovich, {S. V.} and Campbell, {E. E.B.}",

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doi = "10.1109/CRMICO.2003.158920",

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Popok, VN, Prasalovich, SV & Campbell, EEB 2003, New direction in nanotechnology: Cluster ion beam technique. in 2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings., 1256606, 2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings true, Institute of Electrical and Electronics Engineers Inc., pp. 523-525, 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003, Sevastopol, Crimea, Ukraine, 8/09/03. https://doi.org/10.1109/CRMICO.2003.158920

New direction in nanotechnology: Cluster ion beam technique. / Popok, V. N.; Prasalovich, S. V.; Campbell, E. E.B.
2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. p. 523-525 1256606 (2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings true).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Popok VN, Prasalovich SV, Campbell EEB. New direction in nanotechnology: Cluster ion beam technique. In 2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. p. 523-525. 1256606. (2003 13th International Crimean Conference "Microwave and Telecommunication Technology", CriMiCo 2003 - Conference Proceedings true). doi: 10.1109/CRMICO.2003.158920