@inproceedings{d8c3cb745274409999e2eb94be3bfa25,
title = "New direction in nanotechnology: Cluster ion beam technique",
abstract = "A brief state-of-the-art review in the field of cluster ion interaction with surface is presented. Ionised cluster beams are considered as a powerful and versatile tool for modification and processing of surfaces and near-surface layers as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion beams are discussed.",
author = "Popok, {V. N.} and Prasalovich, {S. V.} and Campbell, {E. E.B.}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; null ; Conference date: 08-09-2003 Through 12-09-2003",
year = "2003",
doi = "10.1109/CRMICO.2003.158920",
language = "English",
series = "2003 13th International Crimean Conference {"}Microwave and Telecommunication Technology{"}, CriMiCo 2003 - Conference Proceedings true",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "523--525",
booktitle = "2003 13th International Crimean Conference {"}Microwave and Telecommunication Technology{"}, CriMiCo 2003 - Conference Proceedings",
}