Nanoscale observation of charge redistribution in Pb(Zr,Ti)O 3 thin films on Pt

Y. J. Oh; J. H. Hur; W. Jo

Nanoscale observation of charge redistribution in Pb(Zr,Ti)O ₃ thin films on Pt

Y. J. Oh, J. H. Hur, W. Jo

Department of Physics

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

We report charge redistribution in polycrystalline Pb(Zr _0.52Ti _0.48)O ₃ (PZT) thin films on Pt electrode. A sol-gel method is used to make ferroelectric PZT thin films. Highly (100) and (111) oriented PZT thin films are prepared on Pt/Ti-coated SiO ₂/Si (100). Drying conditions before crystallizing heat treatments have been explored over a wide range of temperature. Surface charge and polarization of the PZT films are observed by detecting an electrostatic force exerted on the biased conductive probe. Poling behavior is likely to have a relation with leakage current in the ferroelectric thin films. Trapping behavior of space charges is strongly dependent on the bottom electrode.

Original language	English
Pages (from-to)	S522-S525
Journal	Journal of the Korean Physical Society
Volume	47
Issue number	SUPPL. 3
State	Published - Nov 2005

Keywords

Charge redistribution
Electrostatic force microscopy
Polarization
PZT

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title = "Nanoscale observation of charge redistribution in Pb(Zr,Ti)O 3 thin films on Pt",

abstract = "We report charge redistribution in polycrystalline Pb(Zr 0.52Ti 0.48)O 3 (PZT) thin films on Pt electrode. A sol-gel method is used to make ferroelectric PZT thin films. Highly (100) and (111) oriented PZT thin films are prepared on Pt/Ti-coated SiO 2/Si (100). Drying conditions before crystallizing heat treatments have been explored over a wide range of temperature. Surface charge and polarization of the PZT films are observed by detecting an electrostatic force exerted on the biased conductive probe. Poling behavior is likely to have a relation with leakage current in the ferroelectric thin films. Trapping behavior of space charges is strongly dependent on the bottom electrode.",

keywords = "Charge redistribution, Electrostatic force microscopy, Polarization, PZT",

author = "Oh, {Y. J.} and Hur, {J. H.} and W. Jo",

year = "2005",

month = nov,

language = "English",

volume = "47",

pages = "S522--S525",

journal = "Journal of the Korean Physical Society",

issn = "0374-4884",

publisher = "Korean Physical Society",

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T1 - Nanoscale observation of charge redistribution in Pb(Zr,Ti)O 3 thin films on Pt

AU - Oh, Y. J.

AU - Hur, J. H.

AU - Jo, W.

PY - 2005/11

Y1 - 2005/11

N2 - We report charge redistribution in polycrystalline Pb(Zr 0.52Ti 0.48)O 3 (PZT) thin films on Pt electrode. A sol-gel method is used to make ferroelectric PZT thin films. Highly (100) and (111) oriented PZT thin films are prepared on Pt/Ti-coated SiO 2/Si (100). Drying conditions before crystallizing heat treatments have been explored over a wide range of temperature. Surface charge and polarization of the PZT films are observed by detecting an electrostatic force exerted on the biased conductive probe. Poling behavior is likely to have a relation with leakage current in the ferroelectric thin films. Trapping behavior of space charges is strongly dependent on the bottom electrode.

AB - We report charge redistribution in polycrystalline Pb(Zr 0.52Ti 0.48)O 3 (PZT) thin films on Pt electrode. A sol-gel method is used to make ferroelectric PZT thin films. Highly (100) and (111) oriented PZT thin films are prepared on Pt/Ti-coated SiO 2/Si (100). Drying conditions before crystallizing heat treatments have been explored over a wide range of temperature. Surface charge and polarization of the PZT films are observed by detecting an electrostatic force exerted on the biased conductive probe. Poling behavior is likely to have a relation with leakage current in the ferroelectric thin films. Trapping behavior of space charges is strongly dependent on the bottom electrode.

KW - Charge redistribution

KW - Electrostatic force microscopy

KW - Polarization

KW - PZT

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M3 - Article

AN - SCOPUS:29344461332

SN - 0374-4884

VL - 47

SP - S522-S525

JO - Journal of the Korean Physical Society

JF - Journal of the Korean Physical Society

IS - SUPPL. 3

ER -

Nanoscale observation of charge redistribution in Pb(Zr,Ti)O 3 thin films on Pt

Abstract

Keywords

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Nanoscale observation of charge redistribution in Pb(Zr,Ti)O ₃ thin films on Pt