Multi-step plasma etching process for development of highly photosensitive InSb mid-IR FPAs

  • Chulkyun Seok
  • , Minkyung Choi
  • , In Sang Yang
  • , Sehun Park
  • , Yongjo Park
  • , Euijoon Yoon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

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