Multi-layer processed probes for permittivity measurement

Eum Min Jeong; Geunseok Jeong; Jung Mu Kim; Jae Hyoung Park; Jei Won Cho; Changyul Cheon; Yong Kweon Kim; Youngwoo Kwon

Multi-layer processed probes for permittivity measurement

Eum Min Jeong, Geunseok Jeong, Jung Mu Kim, Jae Hyoung Park, Jei Won Cho, Changyul Cheon, Yong Kweon Kim, Youngwoo Kwon

Divison of Brain & Cognitive Sciences

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

Abstract

Probes fabricated using multi-layer process are proposed for complex permittivity measurements in microwavef frequency range, For multi-layer processing, we have considered LTCC(Low Temperature Co-fired Ceramic) and MEMS(Micro-Electro-Mechanical-Systems) processes to make the probe smaller and thus to be applicable to small biological tissues. We expect the probe size can be reduced to 0.1mm by 0.2mm if necessary. We also investigate the shielding effect of vias that is normally used to support TEM wave inside the planar transmission line structure. The complex permittivity of 0.9% saline in microwave frequency range(100MHz-40GHz) was measured using MEMS and LTCC preise to verify the usefulness of the proposed probes.

Original language	English
Pages (from-to)	1813-1816
Number of pages	4
Journal	IEEE MTT-S International Microwave Symposium Digest
Volume	3
State	Published - 2004
Event	2004 IEEE MITT-S International Microwave Symposium Digest - Fort Worth, TX, United States Duration: 6 Jun 2004 → 11 Jun 2004

Keywords

LTCC probe
MEMS probe
Permittivity measurement
Permittivity of biological tissues

Cite this

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title = "Multi-layer processed probes for permittivity measurement",

abstract = "Probes fabricated using multi-layer process are proposed for complex permittivity measurements in microwavef frequency range, For multi-layer processing, we have considered LTCC(Low Temperature Co-fired Ceramic) and MEMS(Micro-Electro-Mechanical-Systems) processes to make the probe smaller and thus to be applicable to small biological tissues. We expect the probe size can be reduced to 0.1mm by 0.2mm if necessary. We also investigate the shielding effect of vias that is normally used to support TEM wave inside the planar transmission line structure. The complex permittivity of 0.9% saline in microwave frequency range(100MHz-40GHz) was measured using MEMS and LTCC preise to verify the usefulness of the proposed probes.",

keywords = "LTCC probe, MEMS probe, Permittivity measurement, Permittivity of biological tissues",

author = "Jeong, {Eum Min} and Geunseok Jeong and Kim, {Jung Mu} and Park, {Jae Hyoung} and Cho, {Jei Won} and Changyul Cheon and Kim, {Yong Kweon} and Youngwoo Kwon",

year = "2004",

language = "English",

volume = "3",

pages = "1813--1816",

journal = "IEEE MTT-S International Microwave Symposium Digest",

issn = "0149-645X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "2004 IEEE MITT-S International Microwave Symposium Digest ; Conference date: 06-06-2004 Through 11-06-2004",

}

TY - JOUR

T1 - Multi-layer processed probes for permittivity measurement

AU - Jeong, Eum Min

AU - Jeong, Geunseok

AU - Kim, Jung Mu

AU - Park, Jae Hyoung

AU - Cho, Jei Won

AU - Cheon, Changyul

AU - Kim, Yong Kweon

AU - Kwon, Youngwoo

PY - 2004

Y1 - 2004

N2 - Probes fabricated using multi-layer process are proposed for complex permittivity measurements in microwavef frequency range, For multi-layer processing, we have considered LTCC(Low Temperature Co-fired Ceramic) and MEMS(Micro-Electro-Mechanical-Systems) processes to make the probe smaller and thus to be applicable to small biological tissues. We expect the probe size can be reduced to 0.1mm by 0.2mm if necessary. We also investigate the shielding effect of vias that is normally used to support TEM wave inside the planar transmission line structure. The complex permittivity of 0.9% saline in microwave frequency range(100MHz-40GHz) was measured using MEMS and LTCC preise to verify the usefulness of the proposed probes.

AB - Probes fabricated using multi-layer process are proposed for complex permittivity measurements in microwavef frequency range, For multi-layer processing, we have considered LTCC(Low Temperature Co-fired Ceramic) and MEMS(Micro-Electro-Mechanical-Systems) processes to make the probe smaller and thus to be applicable to small biological tissues. We expect the probe size can be reduced to 0.1mm by 0.2mm if necessary. We also investigate the shielding effect of vias that is normally used to support TEM wave inside the planar transmission line structure. The complex permittivity of 0.9% saline in microwave frequency range(100MHz-40GHz) was measured using MEMS and LTCC preise to verify the usefulness of the proposed probes.

KW - LTCC probe

KW - MEMS probe

KW - Permittivity measurement

KW - Permittivity of biological tissues

UR - http://www.scopus.com/inward/record.url?scp=4544298454&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:4544298454

SN - 0149-645X

VL - 3

SP - 1813

EP - 1816

JO - IEEE MTT-S International Microwave Symposium Digest

JF - IEEE MTT-S International Microwave Symposium Digest

T2 - 2004 IEEE MITT-S International Microwave Symposium Digest

Y2 - 6 June 2004 through 11 June 2004

ER -

Multi-layer processed probes for permittivity measurement

Abstract

Keywords

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