Abstract
Carbon nanofibers (CNFs), grown by dc plasma-enhanced chemical vapor deposition, have differences in morphology and resulting field emission properties depending on underlying buffer layers. We patterned 200-nm-sized Ni catalyst dots, with 2-5 μm spacing, by e-beam lithography and obtained regularly spaced vertically aligned CNF arrays. CNFs, grown on Ti-buffered Si substrates, showed a needle like shape with a high aspect ratio, but CNFs directly grown on Si substrates, had a cone like shape. The former showed a smaller turn-on field (11 V/μm) than the latter (27 V/μm), in field emission current measurements. Moreover, the maximum current density of the CNF array on Ti was as high as 10 A/cm2.
| Original language | English |
|---|---|
| Pages (from-to) | 346-349 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 45 |
| Issue number | 1 A |
| DOIs | |
| State | Published - 10 Jan 2006 |
Keywords
- Carbon nanofiber
- Dc plasma-enhanced chemical vapor deposition
- Field emission
- Morphology